Patents Assigned to APPLIEED MATERIALS ISRAEL LTD.
  • System for electrical measurements of objects in a vacuumed environment
    Patent number: 9958501
    Abstract: A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: May 1, 2018
    Assignee: APPLIEED MATERIALS ISRAEL LTD.
    Inventors: Amir Wachs, Alon Litman, Efim Vinnitsky