Patents Assigned to ASAHI KOAGKU KOGYO KABUSHIKI KAISHA
  • Publication number: 20030001798
    Abstract: In a multi-exposure drawing method for drawing a pattern on a drawing surface, using an exposure unit including a plurality of optical modulation elements arranged in a matrix manner, the unit is continuously and relatively moved at a constant velocity with respect to the drawing surface in an array-direction defined by a matrix-arrangement of the modulation elements. Optical modulation elements, spaced at a regular interval in an alignment of optical modulation elements along the array-direction, are successively and selectively driven based on a same bit datum, to thereby modulate a light beam made incident thereon, whenever the exposure unit is moved by a distance corresponding to the regular interval, resulting in the production of a pixel dot on the drawing surface in a multi-exposure manner by the modulated light beams.
    Type: Application
    Filed: June 27, 2002
    Publication date: January 2, 2003
    Applicant: ASAHI KOAGKU KOGYO KABUSHIKI KAISHA
    Inventor: Takashi Okuyama