Abstract: The present invention provides a system which comprises primary supply pumps and secondary supply pumps and controls pressurized water supply systems, air-conditioning systems, or the like that supply chilled water or hot water using these pumps. In the present invention, calculation is carried out based on measurement signals obtained by measuring pressure, flow rate, open rate of valves, etc. by providing sensors in supply channels.

Abstract: A combination of a semiconductor region essentially consisting of Al.sub.x Ga.sub.1-x As (0.ltoreq.x.ltoreq.1), an insulating film formed on the surface of the semiconductor region and essentially consisting of GaAs.sub.x P.sub.y O.sub.z (w, y, z>0), and a passivation film formed on the insulating film and made of an insulating material different from the insulating film. The laminated insulating film has an extremely low leakage current. An excellent MISFET can be realized by forming a gate electrode on the surface of the laminated insulating film.

Abstract: In a method of constructing a ceiling frame to support a filter at the ceiling of a clean room, the method is characterized in that a number of divisional frame units are formed, each in a rectangular frame, to frame a filter unit to be installed, that those divisional frame units are positioned one after another at the ceiling of the clean room, that the ceiling frame is formed by connecting, to unify, abutting frame members of the divisional frame units, and that the divisional frame units are hanged at the ceiling with hangers applied at the abutting portions of the divisional frame units.

Abstract: A clean room arrangement comprises a clean room having an upper portion and a lower portion. Clean air is introduced into the upper portion of the clean room, flows downward and expelled from the lower portion of the clean room. An air recirculation passage is connected to the clean room such that the lower portion of the clean room is communicated with the upper portion of the clean room. A heat source is provided in the air recirculation passage to generate an ascending flow of air in the air recirculation passage so that the air descends in the clean room due to natural convection.

Abstract: A heat pipe unit comprising a relatively thin box-shaped panel body in which coolant is charged, a heat-transfer pipe provided in an upper area in the panel body in which cooling fluid is fed and a device for guiding to an inner wall of the panel body the coolant liquified by the heat-transfer pipe.