Abstract: An electrostatic spraying device includes a device body having a paint supply passage, a paint nozzle located on a distal end of the device body and having a paint flow passage communicating with the paint supply passage and a paint outlet, a high-voltage generating part configured to generate high voltage with which paint is charged, and a high-voltage electrode disposed a predetermined distance backwardly away from the paint outlet on an outer periphery of the device body, so as to be separated from the paint flow passage. The device further includes a conductor located between the high-voltage generating part and the high-voltage electrode, a spring located between the high-voltage electrode and the conductor, a high-voltage electrode case detachably attached to the device body to enclose the high-voltage electrode, and a grip mounted on an end of the device body, which end is located opposite the paint nozzle.

Abstract: The disclosed electrostatic coating system (1) includes a spray gun (2) for electrostatic coating, a high-voltage generator (5), and an alternating-current source unit (4), and further includes a removable grounding member (7), in a state attached to the main body of the gun, provided to close an open-circuit portion (3c) of the grounded power source line (3a), and a control circuit (8) for controlling the alternating current source unit (4) by detecting the current flowing through the power source line (3) or the voltage of the power source line (3) by a current coil (13) to stop application of the alternating voltage (Vac) to the high-voltage generator (5) when the detected electric current or the detected voltage has dropped or either the current or the voltage is not detected during supply of the alternating voltage (Vac) to the high voltage generator (5) of the spray gun (2). This system enables prevention of charging of the removable grounding member (7) to improve the safety in the coating operation.

Abstract: An electrostatic spraying device includes a device body having a paint supply passage connected to a paint supply source, a paint nozzle located on a distal end of device body and having a paint flow passage communicating with the paint supply passage and a paint outlet formed through a distal end of the paint flow passage, a high-voltage generating part which generates high voltage with which paint sprayed from the paint outlet is charged, and a high-voltage electrode to which the high voltage generated by the high voltage generating part is applied. The high-voltage electrode is disposed at a position a predetermined distance backwardly away from the paint outlet on an outer periphery of the device body, so as to be separated from the paint flow passage thereby to be insulated from the paint flow passage.

Abstract: The disclosed electrostatic coating system (1) includes a spray gun (2) for electrostatic coating, a high-voltage generator (5), and an alternating-current source unit (4), and further includes a removable grounding member (7), in a state attached to the main body of the gun, provided to close an open-circuit portion (3c) of the grounded power source line (3a), and a control circuit (8) for controlling the alternating current source unit (4) by detecting the current flowing through the power source line (3) or the voltage of the power source line (3) by a current coil (13) to stop application of the alternating voltage (Vac) to the high-voltage generator (5) when the detected electric current or the detected voltage has dropped or either the current or the voltage is not detected during supply of the alternating voltage (Vac) to the high voltage generator (5) of the spray gun (2). This system enables prevention of charging of the removable grounding member (7) to improve the safety in the coating operation.

Abstract: A spray gun suitable for electrostatic coating, using a coating material whose electric resistance is relatively low. A coating material nozzle is attached to the front middle region of a barrel having a forwardly projecting cylindrical section on the front outer peripheral edge, and an air cap which covers their front surfaces is installed. A pattern air flow channel is formed between the air cap, coating material nozzle outer peripheral surface and the cylindrical section inner peripheral surface, and an annular electrode is attached to the inside of the flow channel. The air cap is centrally provided with an atomization air spout hole, and a coating material delivery port at the front end of the coating material nozzle is inserted therein. A pin electrode is projected forward through the coating material delivery port. Two pairs of projections project forward from two sets of opposed locations for the air cap, each with a pattern air spout hole.

Abstract: The present invention provides a nozzle device comprising a substantially cylindrical nozzle body and a cup member which is arranged within the cylinder of the nozzle body and jets out fluid droplets from the tip thereof while being driven to turn, wherein two or more fluids including a detergent and a gas are mixed and jetted out of the tip of the nozzle in order to achieve sufficient cleaning of a single wafer without a re-adhesion of contamination or destruction of the pattern of the wafer. Therefore, the fluid droplets can be controlled to a smaller size than the conventional double-fluid cleaning system or high pressure jet system.

Abstract: When a drive gear (a driving rotary assembly) is actuated and rotates the rotor (a driven rotary assembly), agitator blades rotate and agitate a base compound (a fluid) and a cure agent (a fluid) in an agitation cavity thereby shearing them. This agitation results in the base compound and the cure agent being mixed into a coating material. Furthermore, magnet force is used for giving rotation force to the rotor 50, and therefore any rotation force transmitting member that penetrates a cylindrical assembly is unnecessary. Therefore, such a rotation trouble caused by the fluids that enter into a gap between the transmitting member and the penetration, increases the viscosity therein, and adhere thereto does not occur.

Abstract: The present invention provides a nozzle device comprising a substantially cylindrical nozzle body and a cup member which is arranged within the cylinder of the nozzle body and jets out fluid droplets from the tip thereof while being driven to turn, wherein two or more fluids including a detergent and a gas are mixed and jetted out of the tip of the nozzle in order to achieve sufficient cleaning of a single wafer without a re-adhesion of contamination or destruction of the pattern of the wafer. Therefore, the fluid droplets can be controlled to a smaller size than the conventional double-fluid cleaning system or high pressure jet system.

Abstract: To provide a liquid feed pump, a filter housing, a valve and a spray nozzle and a spray apparatus incorporating these components that can suppress contamination of the liquid being fed. A liquid feed pump 10 includes: a cylinder 12 having a substantially cylindrical shape; and a piston 14 fitted into the cylinder. The liquid feed pressure of the liquid feed pump 10 is equal to or higher than 1 MPa and equal to or lower than 50 MPa, and substantially the whole surface of a liquid contacting part of the liquid feed pump is made of a resin material or a ceramic material.

Abstract: The present invention provides a dressing method for a polishing pad in a polishing apparatus which performs work with a work piece contacting a polishing pad while supplying a slurry, comprising the steps of performing dressing of the polishing pad by pressing a pad dresser against the polishing pad and performing dressing of the polishing pad by making a cleaning fluid fog drops each with a droplet grain size of 1 ?m to 500 ?m inclusive and spouting the fog drops to the polishing pad from a nozzle at a speed of 10 m/second to 500 m/second inclusive.

Abstract: A painting machine includes a powder paint spray gun, a mixer for mixing a plurality of powder paints having different colors, and a control device controlling an amount of each powder paint supplied to the powder paint spray gun so that a mixing ratio of the powder paints is continuously changed.

Abstract: Dressing is performed by spraying a cleaning liquid onto a polishing pad and after that abrasive slurry injected from a nozzle is supplied to the polishing pad. Provided is a method of conditioning a polishing pad for semiconductor wafer which is suitable for keeping the polishing performance of a polishing pad, provided with a polishing device for semiconductor wafer, in a stable condition for a long time.

Abstract: A method and an apparatus capable of stripping resist efficiently in a short amount of time. A stripping solution under high pressure is jetted from a nozzle to a rotating wafer. The resist layer on the wafer is applied with the jetted stripping solution, and the resist layer can be efficiently stripped in a short amount of time by the multiplied effect by the physical effect caused by the impact of the jetted stripping solution and the chemical effect of the stripping solution.

Abstract: A method and an apparatus capable of stripping resist efficiently in a short amount of time. A stripping solution under high pressure is jetted from a nozzle to a rotating wafer. The resist layer on the wafer is applied with the jetted stripping solution, and the resist layer can be efficiently stripped in a short amount of time by the multiplied effect by the physical effect caused by the impact of the jetted stripping solution and the chemical effect of the stripping solution.

Abstract: A method and an apparatus capable of stripping resist efficiently in a short amount of time. A stripping solution under high pressure is jetted from a nozzle to a rotating wafer. The resist layer on the wafer is applied with the jetted stripping solution, and the resist layer can be efficiently stripped in a short amount of time by the multiplied effect by the physical effect caused by the impact of the jetted stripping solution and the chemical effect of the stripping solution.

Abstract: A painting machine includes a powder paint spray gun, a mixer for mixing a plurality of powder paints having different colors, and a control device controlling an amount of each powder paint supplied to the powder paint spray gun so that a mixing ratio of the powder paints is continuously changed.

Abstract: An improved hand held rotary atomizer spray gun is disclosed. The spray gun includes a housing with a depending handle. A paint tube within the housing delivers paint to a rotatable bell atomizer which is mounted adjacent the front of the gun. A turbine assembly includes a turbine rotor which drives a turbine shaft which mounts the bell atomizer. The turbine shaft is supported by a bearing air chamber. A turbine air passageway and a bearing air passageway supply turbine air to the turbine rotor and bearing air to the bearing air chamber. When a trigger is squeezed paint is supplied to the atomizer bell while turbine air rotates the turbine shaft and the bell atomizer. An air shuttle assembly prevents air flow to the turbine unless sufficient bearing air is flowing to the bearing air chamber. In a preferred embodiment shaping air is supplied to shaping air openings in a housing air cap and the atomizer bell includes serrations on its inner edge.

Abstract: An improved HVLP spray gun which operates from an air supply source and an improved nozzle therefor are disclosed. The HVLP gun has a fluid nozzle including a first, integral, laterally extending portion including pressure reduction orifices which are calibrated, relative to a fluid passage in the nozzle, so that the spray gun operates as an HVLP spray gun. The fluid nozzle includes a second laterally extending portion including a surface, against which atomization air impinges after exiting the calibrated pressure reduction orifices, and a plurality of longitudinally extending air distribution holes, wherein atomization air, after passing through the calibrated pressure reduction orifices, is directed radially outwardly in an expansion chamber where the low velocity air is pressure equalized before exiting through the air distribution holes and being directed within the air cap inwardly toward a fluid atomizing annulus.

Abstract: A voltage block device for use with electrostatic spraying apparatus for conductive coatings is disclosed. The device maintains an air gap which electrically isolates a grounded paint supply from a charged spray head to prevent the leakage of potential to the grounded paint supply. The device comprises a tube made of non-conductive material and having ends which are closed by upper and lower caps to define a closed space which is pressurized. A valve secured in the upper cap delivers paint into the closed space to raise the level of conductive coating material therein to the level of an external sensor. In a first mode of operation, valve interlock circuitry opens the valve when the spray head is not charged and the sensor detects a low level of coating material. The valve closes if the level of conductive coating material in the closed space reaches the external sensor or the spray head becomes charged, restoring an air gap which electrically isolates the grounded paint supply.

Abstract: The rotary atomizer coater is particularly adaptable to a high voltage rotary atomizer coater which can be robot mounted. A rotatable bell cup, which is mounted on a turbine driven shaft is positioned within a housing. A fluid tube within the housing includes a fluid discharge tip which extends through an inlet opening in the bell cup for supplying charged coating fluid directly to the inner surface of the bell cup interior which is open to atmosphere. An electrical resistor is mounted between the fluid discharge tip and a power supply within the housing. When a grounded object approaches the bell cup, the current between the bell cup and the grounded object will increase and voltage drop across the resistor results, thereby reducing the voltage at the bell cup and diminishing the potential for a high energy spark.