Patents Assigned to Ascentool International Limited
  • Substrate processing system having improved substrate transport system
    Patent number: 8408858
    Abstract: A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. At least some of the first rollers and the second rollers are idler rollers.
    Type: Grant
    Filed: August 22, 2010
    Date of Patent: April 2, 2013
    Assignee: Ascentool International Limited
    Inventors: George X. Guo, Kai-an Wang