Patents Assigned to ASCENX
  • Systems and methods for measuring belt tension
    Patent number: 7185546
    Abstract: Systems and methods for measuring belt tension in a semiconductor processing system include measuring a natural sound or an acceleration of the belt in the semiconductor processing system; digitizing the natural sound or the acceleration; determining the frequency and characterizing the belt tension as a function of the frequency.
    Type: Grant
    Filed: June 14, 2004
    Date of Patent: March 6, 2007
    Assignee: ASCENX
    Inventor: Canh Le