Patents Assigned to Ashland
  • Photoresist stripping composition
    Patent number: 5554312
    Abstract: A non-aqueous photoresist stripping composition for effectively preventing the redeposition of alkali metal ions, particularly sodium and potassium ions, on a substrate during the stripping operation is disclosed. The stripping composition comprises:(a) an organic polar solvent;(b) an organic aliphatic or aromatic amine, or an organic amino alcohol; and(c) either polyethylene glycol or polypropylene glycol in an amount to provide a caging effect. The composition also preferably includes a biodegradable organic solvent.
    Type: Grant
    Filed: January 13, 1995
    Date of Patent: September 10, 1996
    Assignee: Ashland
    Inventor: Irl E. Ward