Patents Assigned to ASM Holding B.V.
  • CHAMBER SEALING MEMBER
    Publication number: 20130129577
    Abstract: A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.
    Type: Application
    Filed: November 14, 2012
    Publication date: May 23, 2013
    Applicant: ASM Holding B.V.
    Inventor: ASM IP Holding B.V.