Abstract: An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool down chamber, each sealed from the other. The sealing of these individual chambers, each from the other, has the effect of minimizing processing delays associated with the cooling process and the loading and unloading process to thereby improve the productivity of the furnace. The process chamber includes non-metallic media such that it can be operated in oxidation systems so that corrosive acids will not affect the process chamber operation.
Type:
Grant
Filed:
January 18, 1991
Date of Patent:
August 9, 1994
Assignee:
ASM VT, Inc.
Inventors:
John J. Devilbiss, Steve Lugosi, Robert G. Ozarski
Abstract: An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool-down chamber, each sealed from the other. The sealing of these individual chambers, each from the other, has the effect of minimizing processing delays associated with the cooling process and the loading and unloading process to thereby improve the productivity of the furnace.
Type:
Grant
Filed:
August 7, 1989
Date of Patent:
October 19, 1993
Assignee:
ASM VT, Inc.
Inventors:
John J. Devilbiss, James A. Glaze, Steve Lugosi, Allen D. McNaughton, Robert G. Ozaraki