Abstract: To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at least two detector signals corresponding to intensities of radiation being incident on different parts of the detector system or the detector system outputs at least two detector signals corresponding to intensities of radiation with different wavelengths being incident on the detector system. If radiation is received from a ghost particle, not each of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a particle results in the signals having substantially a same level above a threshold level.
Type:
Application
Filed:
October 4, 2005
Publication date:
April 6, 2006
Applicant:
ASML Nethderlands B.V.
Inventors:
Johannes Onvlee, Raimond Visser, Peter Greve, Johannes Franssen, Erwin Verhagen