Patents Assigned to ASML NETHEDRLANDS B.V.
  • Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method
    Publication number: 20050231043
    Abstract: A coil assembly has at least two coils which are arranged in a common plane, and partially overlap in crossover sections of the coils. The crossover sections have a reduced height, which results in a reduced total height of the coil assembly. This leads to a more compact coil assembly, and hence to better dynamic characteristics of a positioning device in which the coil assembly is applied.
    Type: Application
    Filed: April 16, 2004
    Publication date: October 20, 2005
    Applicant: ASML NETHEDRLANDS B.V.
    Inventors: Johannes Petrus Martinus Vermeulen, Henricus Wilhelmus Janssen, Erik Loopstra