Patents Assigned to ASML Netherands B.V.
  • Method and apparatus for inspection and metrology
    Patent number: 11170072
    Abstract: A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: November 9, 2021
    Assignee: ASML Netherands B.V.
    Inventors: Everhardus Cornelis Mos, Velislava Ignatova, Erik Jensen, Michael Kubis, Hubertus Johannes Gertrudus Simons, Peter Ten Berge, Erik Johannes Maria Wallerbos, Jochem Sebastiaan Wildenberg