Patents Assigned to ASML Netherelands B.V.
  • Electrostatic Clamp Apparatus And Lithographic Apparatus
    Publication number: 20140002805
    Abstract: Disclosed is an electrostatic clamp apparatus (500) constructed to support a patterning device (505) of a lithographic apparatus, comprising a support structure against which said patterning device is supported, clamping electrodes (525) for providing a clamping force between the support structure and patterning device, and an array of capacitive sensors (660) operable to measure the shape of said patterning device.
    Type: Application
    Filed: January 18, 2012
    Publication date: January 2, 2014
    Applicant: ASML Netherelands B.V.
    Inventors: Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Theodorus Petrus Maria Cadee, Johannes Antonius Gerardus Akkermans, Luigi Scaccabarozzi, Christiaan Louis Valentin