Abstract: A method includes irradiating a target structure with sequential illumination shots, directing scattered beams from the target structure towards an imaging detector, generating a detection signal using the imaging detector, and determining a property of the target structure based on at least the detection signal. An integration time for each illumination shot of the sequential illumination shots is selected so to reduce a low frequency error.
Type:
Application
Filed:
December 2, 2021
Publication date:
February 1, 2024
Applicants:
ASML Netheriands B. V., ASML Holding N.V.
Inventors:
Arjan Johannes Anton BEUKMAN, Sebastianus Adrianus GOORDEN, Stephen ROUX, Sergel SOKOLOV, Filippo ALPEGGIANI