Patents Assigned to ASML NETHERLANDE B.V.
  • METHODS OF DETERMINING PROCESS MODELS BY MACHINE LEARNING
    Publication number: 20200026196
    Abstract: Methods of determining, and using, a patterning process model that is a machine learning model. The process model is trained partially based on simulation or based on a non-machine learning model. The training data may include inputs obtained from a design layout, patterning process measurements, and image measurements.
    Type: Application
    Filed: February 20, 2018
    Publication date: January 23, 2020
    Applicant: ASML NETHERLANDE B.V.
    Inventors: Ya LUO, Yu CAO, Jen-Shiang WANG, Yen-Wen LU