Patents Assigned to ASML Netherlands B.V. and ASML Holding N.V.
  • Illumination System
    Publication number: 20090168072
    Abstract: A coherence remover includes a first partially reflective surface and a second partially reflective surface. The coherence remover is configured to receive an input beam. Each of the first and second reflective surfaces is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Application
    Filed: December 4, 2008
    Publication date: July 2, 2009
    Applicant: ASML Netherlands B.V. and ASML Holding N.V.
    Inventors: Huibert VISSER, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Rob Vink, Yevgeniy Shmarev
  • Illumination System
    Publication number: 20090091734
    Abstract: A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Application
    Filed: December 4, 2008
    Publication date: April 9, 2009
    Applicant: ASML Netherlands B.V. and ASML Holding N.V.
    Inventors: Huibert VISSER, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Henri Johannes Petrus Vink, Yevgeniy Konstantinovich Shmarev