Patents Assigned to ASML Nethrlands B.V.
  • An Apparatus, a Device and a Device Manufacturing Method
    Publication number: 20160282723
    Abstract: An apparatus comprising at least one sealing aperture (40) comprising a hollow part (41), having an inner surface (42), extending at an interface between different zones (50;60) of the apparatus; and a member (43) positioned in the hollow part configured to substantially transmit EUV radiation and to substantially filter non-EUV radiation at the interface; wherein the inner surface of the hollow part has a surface treatment configured to increase absorption of the non-EUV radiation that is transferred by the member to the hollow part.
    Type: Application
    Filed: November 4, 2014
    Publication date: September 29, 2016
    Applicant: ASML Nethrlands B.V.
    Inventors: Sander Catharina Reinier DERKS, Eric Willem Felix CASIMIRI, Marcel Mathijs Theodore DIERICHS, Sumant Sukdew Ramanujan OEMRAWSINGH, Wilhelmus Theodorus Anthonius VAN DEN EINDEN, Johannes Fransiscus Maria VELTHUIS, Alexander Nikolov ZDRAVKOV, Wassim ZEIN EDDINE