Patents Assigned to AST Electronik
  • Apparatus and method for rapid thermal processing
    Patent number: 5837555
    Abstract: A closable enclosure for rapid thermal processing of semiconductor wafers is presented, wherein the closable enclosure has an enclosed volume less than 10 times the volume of the wafer, and wherein the closable enclosure may closed about the wafer while the closable enclosure is surrounded by the process gas.
    Type: Grant
    Filed: April 12, 1996
    Date of Patent: November 17, 1998
    Assignee: AST Electronik
    Inventors: Guenter Kaltenbrunner, Zsolt Nenyei, Helmut Sommer