Patents Assigned to AST Elekronik GmbH
  • Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems
    Patent number: 5628564
    Abstract: A method and apparatus for optical pyrometry in a Rapid Thermal Processing (RTP) System, whereby the radiation used to heat the object to be processed in the RTP system is in part specularly reflected from specularly reflecting surfaces and is incident on the object with a particular angular distribution, and the thermal radiation from the object is measured at an angles different from the angle where the incident radiation specularly reflected from the surface of the object is a maximum.
    Type: Grant
    Filed: March 28, 1995
    Date of Patent: May 13, 1997
    Assignee: AST Elekronik GmbH
    Inventors: Zsolt Nenyei, Andreas Tillmann, Heinrich Walk