Abstract: A substrate-treating apparatus including: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; and a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.
Type:
Application
Filed:
August 17, 2006
Publication date:
March 15, 2007
Applicants:
JUSUNG ENGINEERING CO., LTD., ASYS AUTOMATIC SYSTEMS GMBH & CO. KG
Abstract: A substrate-treating apparatus includes: a plurality of modules disposed along a first direction, each of the plurality of modules having an inner space containable a substrate; a transfer unit transferring the substrate among the plurality of modules, the transfer unit including at least one track disposed along the first direction and at least one movable transfer chamber moving along the at least one track; and a gate valve fixed to each of the plurality of modules and combined with the at least one movable transfer chamber, wherein the at least one movable transfer chamber is atmospherically isolated from an exterior while moving.
Type:
Application
Filed:
August 25, 2006
Publication date:
March 1, 2007
Applicants:
JUSUNG ENGINEERING CO., LTD., ASYS AUTOMATIC SYSTEMS GMBH & CO. KG