Abstract: A method of determining the composition of a solid body comprises guiding a primary ionic beam to impact on the body in a spiral path whereby secondary particles are released from the body which are detected and registered in dependence on the location of their release.

Abstract: In a vacuum vapor-deposition system a substrate holder is arranged stationary in the main part of a vapor-deposition chamber. Evaporation apparatuses are arranged on the floor of the vapor-deposition chamber, which is moveably connected to the main part of the vacuum-deposition chamber via a bellows and can swivel about two mutually intersecting axes or be displaced along two mutually intersecting axes with respect to the main part by means of two drive mechanisms. In this way the thermostatization of the substrate and the production of very uniform layers is facilitated.