Patents Assigned to ATTOLIGHT SA
  • Deconvolution of time-gated cathodoluminescence images
    Patent number: 8674320
    Abstract: A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: March 18, 2014
    Assignee: Attolight SA
    Inventor: Jean Berney
  • Deconvolution of Time-Gated Cathodoluminescence Images
    Publication number: 20130193342
    Abstract: A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.
    Type: Application
    Filed: March 12, 2013
    Publication date: August 1, 2013
    Applicant: ATTOLIGHT SA
    Inventor: ATTOLIGHT SA