Patents Assigned to Aurora Control Technologies Inc.
  • Non-contact measurement of the dopant content of semiconductor layers
    Patent number: 8829442
    Abstract: A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material and splitting the radiation into two beams, passing each beam through pass band filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: September 9, 2014
    Assignee: Aurora Control Technologies Inc.
    Inventors: E. Michael Heaven, Gordon Matthew Deans, Kenneth Cadien, Stephen Warren Blaine