Patents Assigned to Automated Wafer Systems
  • Purge tube with floating end cap for loading silicon wafers into a furnace
    Patent number: 4976612
    Abstract: A purge tube for protecting a boat(s) of wafers. This purge tube does not enter the furnace. A floating end cap within the tube moves to substantially seal the furance opening during processing. The floating end cap is withdrawn back to the closed end of the tube when the wafer boat(s) is withdrawn into the tube.
    Type: Grant
    Filed: June 20, 1989
    Date of Patent: December 11, 1990
    Assignee: Automated Wafer Systems
    Inventor: Kenneth H. Adams