Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract: A substrate transport apparatus for transporting substrates, the substrate transport apparatus including a frame, at least one transfer arm connected to the frame, at least one end effector mounted to the at least one transfer arm and at least one substrate support pad disposed on the at least one end effector, the at least one substrate support pad has a configuration that effects increased friction force, resulting from an increased friction coefficient, in at least one predetermined direction.

Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

Abstract: A machine tool coolant supply system includes a chassis configured to mount the coolant supply system to a coolant storage tank of a machine tool. The coolant supply system further includes a concentrate tank arranged within the chassis, a first flow control valve coupled to the concentrate tank, a second flow control valve coupled to a water supply line, and a mixer configured to mix a concentrate with water. The mixer includes a first inlet coupled to the first flow control valve and configured to receive the concentrate from the concentrate tank via the first flow control valve, a second inlet coupled to the second flow control valve and configured to receive the water from the water supply line via the second flow control valve, and an outlet configured to dispense a mixture of the concentrate and the water into the coolant storage tank of the machine tool.

Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.

Abstract: A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators.

Abstract: The apparatus has a bending/cooling station mounted on a base. A tube clamping assembly is mounted on the base, movable towards and away from the bending/cooling station and including a tube clamping assembly and a tube rotation assembly. A tube heating assembly is mounted for movement between the bending/cooling station and the tube clamping assembly. Servomotors move the tube clamping assembly and the tube heating assembly, rotate the tube clamping assembly, and actuate bending at the bending/cooling station. The apparatus is controlled by PLC or PC-based programs, which effect movement via servomotors and control other parameters such as heating and cooling times and temperatures. Bending and cooling the tube at a first bend location, and heating the next desired bend location, take place in overlapping time windows, before advancing the tube to position the next desired bend location of the tube at the bending/cooling station.

Abstract: An apparatus includes a frame configured to hold sample holders in an array, a longitudinal axis of the sample holder extending outward of an array plane; a drive section connected to the frame; at least one transfer arm rotatably connected to the drive section so that each transfer arm rotates about a rotation axis oriented substantially parallel with the longitudinal axis and includes a sample holder gripper; and at least one push member movably connected to the drive section and being distinct from the sample holder gripper and configured for linear movement along the longitudinal axis, the at least one push member being configured so that engagement with at least a bottom or top surface of the sample holder effects longitudinal translation of the sample holder for one or more of capture and release of the sample holder by the respective transfer arm in the longitudinal direction.

Abstract: A tray engine includes a vertical drive column, a rotation mechanism for rotating the vertical drive column, and an end effector attached to the vertical drive column. The end effector includes an end effector base attached to the vertical drive column. The end effector further includes a slide attached to the end effector base to support a tray, when present. The slide enables the tray to slide along a length of the end effector base. The tray engine includes a drive mechanism attached to the end effector base for moving along the length of the end effector base to enable the tray, when present, to slide linearly along the length and load or unload the tray to or from the slide.

Abstract: In order to maintain performance during wireless communication, a transmitting electronic device may concurrently and independently communicate redundant information to a receiving electronic device. In particular, information associated with a data stream may be communicated to the receiving electronic device using one or more channels by two radios using one or more wireless local area network communication protocols. The packets transmitted by the radios may preferentially include the same information. Moreover, the transmitting electronic device may attempt to maintain the redundant communication if a performance metric associated with the one or more channels degrades. For example, the transmitting electronic device may transfer communication to a different channel or may compress the information in the packets in the one or more channels if the throughput drops below a threshold value.

Abstract: Linear semiconductor handling systems provide more balanced processing capacity using various techniques to provide increased processing capacity to relatively slow processes. This may include use of hexagonal vacuum chambers to provide additional facets for slow process modules, use of circulating process modules to provide more processing capacity at a single facet of a vacuum chamber, or the use of wide process modules having multiple processing sites. This approach may be used, for example, to balance processing capacity in a typical process that includes plasma enhanced chemical vapor deposition steps and bevel etch steps.

Abstract: A case packing system for loading articles into containers includes an article conveyor for conveying articles, a case conveyor for conveying containers, and first, second, and third bins. A first robotic mechanism moves articles on the article conveyor to the first, second, and third bins. A second robotic mechanism moves articles from the first, second, and third bins to containers on the case conveyor. A controller operatively coupled to the first robotic mechanism and the second robotic mechanism is configured to pick and place with the first robotic mechanism one or more conveyed articles into the first, second, and third bins, and grab and load with the second robotic mechanism one or more articles from the first, second, and third bins into containers on the case conveyor.

Abstract: In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Abstract: An audio/video (A/V) hub includes a state-detection circuit coupled to at least one pin in a high-definition multimedia-interface input connector, which can electrically couple to an entertainment device. When electrically coupled to the entertainment device, the state-detection circuit establishes a ground loop between the electronic device and the entertainment device. A control circuit in the A/V hub detects whether there is electrical coupling with the entertainment device using the state-detection circuit. When the electrical coupling is detected, the control circuit provides a set of first control commands associated with different types of entertainment devices until, in response, content activity is detected via the input connector.

Abstract: A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

Abstract: A force/torque sensor includes a number n of deformable beams connecting the TAP to the MAP, wherein n?4. At least four of the n deformable beams are instrumented with strain gages affixed to surfaces of the beams, such that each beam outputs two gage signals. The eight gage signals are grouped into four sets of six gage signals, such that each set includes the gage signals from three of the four instrumented beams. Each set of six gage signals is multiplied by a calibration matrix to yield a set of six force and torque values. The four sets of force and torque values are compared. If one set disagrees with the other three by greater than a predetermined tolerance, a sensor fault is signaled.

Abstract: A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.

Abstract: A robotic tool changer includes a locking feature, and may be made washable by sealing against fluid incursion. The tool changer comprises a master unit and one or more tool units, and it transitions between decoupled and coupled states by rotation of one part relative to another. The rotation displaces rolling members in the master unit, such as balls, from a retaining surface to a locking surface which is sized and positioned to force the rolling members against a coupling surface of the tool unit. A deformable pin interposed between the retaining and locking surfaces resists movement of the rolling members therebetween, requiring the application of force. The pin remains deformed, and continues to exert a force on the rolling members, when the robotic tool changer is in the coupled state, providing a locking feature which automatically and positively resists any inadvertent decoupling of the tool changer.

Abstract: An electronic device with a microphone is used to determine a transfer function of an environment (and, more generally, an acoustic characteristic). In particular, the electronic device may use the microphone to perform acoustic measurements when the electronic device is proximate to a speaker in the environment. Then, based on the acoustic measurements and a first predetermined transfer function of the speaker, the electronic device may calculate a transfer function of the microphone in a band of frequencies. Moreover, the electronic device may use the microphone to perform additional acoustic measurements in the environment that includes the speaker. Next, based on the additional acoustic measurements, the transfer function of the microphone and a second predetermined transfer function of the speaker, the electronic device may determine the transfer function of the environment in the same or a different band of frequencies.