Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

Abstract: A device for sealing sample tubes comprises a tool assembly configured to interface with a rack (10) holding a plurality of sample storage tubes (20), the tool assembly holding a plurality of punches (322) and a die plate (324) including a plurality of cutting holes, with each of the plurality of cutting holes accepting one of the plurality of punches (322). The tool assembly receives a foil sheet (131) between the punches (322) and the die plate (324). The device includes an actuator enabling linear movement of the tool assembly. Linear movement of the tool assembly towards the rack (10) engages the die plate (324) against the rack (10) and punches the punches (322) through the cutting holes of the die plate (324) to punch a plurality of sealing sections from the foil sheet (131) and to press and seal each of the sealing sections against a top end of each of the plurality of sample storage tubes (20) in the rack (10).

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

Abstract: A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermin

Abstract: An electronic device that coordinates a playback operation is described. In particular, an interface circuit in the electronic device may calculate, based on differences between transmit times when packets were transmitted by a second electronic device and receive times of the packets, relative drift as a function of time between a clock in the interface circuit and a second clock in the second electronic device. Then, the interface circuit may adjust, based on the relative drift, a clock circuit that provides the clock to eliminate the relative drift, and may determine a remaining time offset between the clock and the second clock. Next, the interface circuit may modify a future time when the electronic device is to perform the playback operation based on the remaining time offset to determine a corrected future time, and the electronic device may perform the playback operation at the corrected future time.

Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.

Abstract: A modular sample store including a storage area; a service area; a transfer area; a motorized robot with a lifting device and at least one platform; and a controller. The sample store service area includes one integrally formed cubic vat module and the sample store storage area includes at least one integrally formed cubic vat module. Each one of the aforementioned vat modules includes an essentially horizontal vat floor and four joining vat walls that are connected to the vat floor and that are leaving an open vat space. The modular sample store also includes upper side walls and a cover plate to close the sample store. Each vat floor and vat wall includes an outside liner and an inside liner, which outside and inside liners in each case are separated by a clearance.

Abstract: Apparatuses, systems and methods associated with a trigger management device for managing triggering of sensors within measurement equipment are disclosed herein. In embodiments, a trigger management device may include trigger circuitry coupled to a sensor, the trigger circuitry to determine an amount of delay from trigger transmission to data capture for the sensor, and transmit a trigger to the sensor, the trigger to cause the sensor to capture sensor data. The trigger management device may further include encoder circuitry coupled to one or more encoders, the one or more encoders to indicate positions of one or more actuators or motors, the encoder circuitry to capture encoder data from the one or more encoders at a time that is the amount of delay after transmission of the trigger, wherein the encoder data indicates current positions of the one or more actuators or motors. Other embodiments may include circuitry to manage and/or transmit encoder and other data to multiple devices.

Abstract: A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.

Abstract: An axially and radially compliant deburring tool holds a commercially available end tool holder, which in turn holds a variety of commercially available interchangeable deburring end tools, such as those commercially available for the hand deburring market. The axially and radially compliant deburring tool exhibits axial compliance in response to an external force by allowing a longitudinal sleeve holding the end tool holder to move longitudinally along a longitudinal axis of the tool, against a bias force. The axially and radially compliant deburring tool exhibits radial compliance in response to an external force by interaction between a cam contact member and a concave cam surface, both under the bias force and hence operative to return the commercially available to a centered, extended position in the absence of external forces.

Abstract: A loudspeaker diaphragm (12) comprising a woven fibre body supports damping material (25), for example PVA polymer, on a rearward-facing surface (24). The woven fibre body may be formed of lengths (14) non-metallic fibre material (for example glass fibre) coating with a thin metal coating (32). The mass of the layer of damping material (25) may be less than the mass of the woven fibre body. An attractive sparkly looking loudspeaker diaphragm (12) may thus be provided which damps undesirable vibration whilst providing a flatter frequency-response curve (50).

Abstract: In accordance with one or more aspects of the disclosed embodiment a semiconductor processing apparatus is provided. The semiconductor processing apparatus includes a frame forming a sealable chamber having a longitudinal axis and lateral sides astride the longitudinal axis, the sealable chamber being configured to hold a sealed environment therein, at least one transport module mounted to the sealable chamber and having a telescoping carriage being configured so that the telescoping carriage is linearly movable relative to another portion of the transport module where the telescoping carriage and the other portion define a telescoping motion along the longitudinal axis, and at least one transfer robot mounted to the carriage, each of the at least one transfer robot having at least one transfer arm configured for holding a substrate thereon.

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

Abstract: A robotic tool changer includes a locking mechanism that enhances safety. More particularly, the locking mechanism is an “over center” locking mechanism that maintains a constant lock force on a tool. The lock force exerted on the tool by the locking mechanism remains substantially constant, even after a motor providing power to the robotic tool changer is removed, and after the robotic tool changer experiences mechanical wear.

Abstract: A semiconductor wafer transport apparatus includes a frame, a transport arm movably mounted to the frame and having at least one end effector movably mounted to the arm so the at least one end effector traverses, with the arm as a unit, in a first direction relative to the frame, and traverses linearly, relative to the transport arm, in a second direction, and an edge detection sensor mounted to the transport arm so the edge detection sensor moves with the transport arm as a unit relative to the frame, the edge detection sensor being a common sensor effecting edge detection of each wafer simultaneously supported by the end effector, wherein the edge detection sensor is configured so the edge detection of each wafer is effected by and coincident with the traverse in the second direction of each end effector on the transport arm.

Abstract: An audio/video (A/V) hub that coordinates playback of audio content is described. In particular, the A/V hub may calculate current time offsets between clocks in electronic devices and a clock in the A/V hub based on differences between transmit times of frames from the electronic devices and receive times when the frames were received. For example, the current time offsets may be calculated using wireless ranging by ignoring distances between the A/V hub and the electronic devices. Then, the A/V hub may transmit, to the electronic devices, one or more frames that include audio content and playback timing information, which may specify playback times when the electronic devices are to playback the audio content based on the current time offsets. Furthermore, the playback times of the electronic devices may have a temporal relationship so that the playback of the audio content by the electronic devices is coordinated.

Abstract: Due to rapid advancement in computing technology of both hardware and software, the labor intensive sewing process has been transformed into a technology-intensive automated process. During an automated process, product materials may become wrinkled or folded, which can slow down the automated process or result in human intervention. Various examples are provided related to the automation of sewing robots, and removal of wrinkles from products. Images of material on a work table can be captured and analyzed to determine if there are wrinkles or folds in the product. The robot can remove the wrinkle or fold by manipulating the material through the use of end effectors such as, e.g., budgers.