Patents Assigned to Avago Technologies Wireless IP (Singapore) Ltd. Pte.
  • PLANARIZED ELECTRODE FOR IMPROVED PERFORMANCE IN BULK ACOUSTIC RESONATORS
    Publication number: 20130106534
    Abstract: In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a cavity disposed in a substrate; a first electrode disposed over the cavity; a planarization layer disposed adjacent to the first electrode; a piezoelectric layer disposed over the first electrode; and a second electrode disposed over the piezoelectric layer.
    Type: Application
    Filed: October 31, 2011
    Publication date: May 2, 2013
    Applicant: Avago Technologies Wireless IP (Singapore) Ltd. Pte.
    Inventors: Dariusz BURAK, Phil NIKKEL, John CHOY, Alexandre SHIRAKAWA, Stefan BADER