Abstract: An abnormality detection method according to one aspect of the present disclosure is a method of detecting an abnormality in an AC signal to be input from an AC power supply. The method includes, where an ideal AC signal is represented as V0 sin ?t (V0: amplitude, co: angular frequency, t: time), calculating an arithmetic value including a value represented by sin2?t+cos2?t and determining that the AC signal is abnormal when the arithmetic value is out of a threshold range.
Type:
Grant
Filed:
May 31, 2022
Date of Patent:
September 19, 2023
Assignees:
Tokyo Electron Limited, AVALDATA CORPORATION