Patents Assigned to Avantor Performance Materials, Inc.
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Publication number: 20170198002Abstract: Provided herein is a highly pure carbohydrate composition, and a method of making a highly pure carbohydrate composition. The method includes passing an aqueous carbohydrate solution through an anion exchange chromatography column including a polyethyleneimine (PEI) chromatographic media to obtain a purified solution, and isolating a highly pure carbohydrate composition from the purified solution.Type: ApplicationFiled: December 23, 2014Publication date: July 13, 2017Applicant: Avantor Performance Materials, Inc.Inventors: Bhaktavachalam THIYAGARAJAN, Martina COX, Nandu DEORKAR
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Publication number: 20170113864Abstract: A package system for maintaining the physicochemical integrity of the contents of the package system that includes: an inner bag formed from a gas and/or moisture permeable material, an outer bag formed from an impermeable polymer material, a discharge port that provides access to the interior of the outer bag; and a desiccant or gas scavenging material. The first end of the outer bag sealingly surrounds the exterior wall of the discharge port. The second end of the inner bag is sealed closed and the desiccant or gas scavenging material is disposed in an isolated compartment. The second end of the outer bag is sealed closed to isolate the interior from the environment exterior to the package system.Type: ApplicationFiled: March 27, 2015Publication date: April 27, 2017Applicant: AVANTOR PERFORMANCE MATERIALS, INC.Inventors: James Farina, Evon Bolessa, Nandu Deorkar
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Patent number: 9327966Abstract: A composition is provided that is effective for removing post etch treatment (PET) polymeric films and photoresist from semiconductor substrates. The composition exhibits excellent polymer film removal capability while maintaining compatibility with copper and low-? dielectrics and contains water, ethylene glycol, a glycol ether solvent, morpholinopropylamine and a corrosion inhibiting compound and optionally one or more metal ion chelating agent, one or more other polar organic solvent, one or more tertiary amine, one or more aluminum corrosion inhibition agent, and one or more surfactant.Type: GrantFiled: May 31, 2012Date of Patent: May 3, 2016Assignee: AVANTOR PERFORMANCE MATERIALS, INC.Inventors: William R. Gemmill, Glenn Westwood
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Patent number: 8986559Abstract: Compositions and methods for chemical texturing a surface of a polycrystalline silicon wafer to be used in the manufacture of solar cells provide increased efficiency in the manufacture and operation of solar cells. The compositions and methods disclosed herein include first and second components, wherein the first component is a UKON etch composition, including a hydrofluoric acid/nitric acid mixture and water, while the second component includes a silicon wafer texturing enhancer (SWTE).Type: GrantFiled: February 27, 2013Date of Patent: March 24, 2015Assignee: Avantor Performance Materials, Inc.Inventors: Nicolas Hildenbrand, Joannes Theodorus Valentinus Hoogboom, Michiel Scheffer, Raymond Albertus Johannes Ten Broeke
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Patent number: 8906838Abstract: Cleaning compositions suitable for cleaning microelectronic structures having silicon dioxide, low-k or high-k di-electrics and copper or aluminum metallizations contain a polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols and a strong alkaline base.Type: GrantFiled: May 27, 2003Date of Patent: December 9, 2014Assignee: Avantor Performance Materials, Inc.Inventor: Chien-Pin Sherman Hsu
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Publication number: 20140263011Abstract: Chromatographic media of porous media particles derivatized with allylamine or polyallylamine obtained directly or through intermolecular polymerization on the surface thereof and such media functionalized with further functionalization groups. Such media are particularly useful for separating biomolecules.Type: ApplicationFiled: May 3, 2012Publication date: September 18, 2014Applicant: Avantor Performance Materials, Inc.Inventors: Bhaktavachalam Thiyagarajan, Wei Guo, Nandu Deorkar
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Publication number: 20140248781Abstract: A composition is provided that is effective for removing post etch treatment (PET) polymeric films and photoresist from semiconductor substrates. The composition exhibits excellent polymer film removal capability while maintaining compatibility with copper and low-? dielectrics and contains water, ethylene glycol, a glycol ether solvent, morpholinopropylamine and a corrosion inhibiting compound and optionally one or more metal ion chelating agent, one or more other polar organic solvent, one or more tertiary amine, one or more aluminum corrosion inhibition agent, and one or more surfactant.Type: ApplicationFiled: May 31, 2012Publication date: September 4, 2014Applicant: Avantor Performance Materials, Inc.Inventors: William R. Gemmill, Glenn Westwood
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Patent number: 8557757Abstract: A cleaning composition for cleaning microelectronic or nanoelectronic devices, the cleaning composition having HF as the sole acid and sole fluoride compound in the composition, at least one primary solvent selected from the group consisting of sulfones and selenones, at least one polyhydroxyl alkyl or aryl alcohol co-solvent having metal ion complexing or binding sites, and water, and optionally at least one phosphonic acid corrosion inhibitor compound and the is free of amines, bases and other salts.Type: GrantFiled: January 14, 2010Date of Patent: October 15, 2013Assignee: Avantor Performance Materials, Inc.Inventors: Chien-Pin S. Hsu, Glenn Westwood, William R. Gemmill
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Publication number: 20130224898Abstract: Compositions and methods for chemical texturing a surface of a polycrystalline silicon wafer to be used in the manufacture of solar cells provide increased efficiency in the manufacture and operation of solar cells. The compositions and methods disclosed herein include first and second components, wherein the first component is a UKON etch composition, including a hydrofluoric acid/nitric acid mixture and water, while the second component includes a silicon wafer texturing enhancer (SWTE).Type: ApplicationFiled: February 27, 2013Publication date: August 29, 2013Applicant: AVANTOR PERFORMANCE MATERIALS, INC.Inventor: AVANTOR PERFORMANCE MATERIALS, INC.
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Patent number: 8497233Abstract: A composition for removal of high dosage ion implanted photoresist from the surface of a semiconductor device, the composition having at least one solvent having a flash point >65° C., at least one component providing a nitronium ion, and at least one phosphonic acid corrosion inhibitor compound, and use of such a composition to remove high dosage ion implanted photoresist from the surface of a semiconductor device.Type: GrantFiled: February 18, 2010Date of Patent: July 30, 2013Assignee: Avantor Performance Materials, Inc.Inventor: Glenn Westwood
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Patent number: 8481472Abstract: A highly aqueous acidic cleaning composition for copper oxide etch removal from Cu-dual damascene microelectronic structures and wherein that composition prevents or substantially eliminates copper redeposition on the Cu-dual damascene microelectronic structure.Type: GrantFiled: October 6, 2009Date of Patent: July 9, 2013Assignee: Avantor Performance Materials, Inc.Inventors: Glenn Westwood, Seong Jin Hong, Sang In Kim
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Patent number: 8338350Abstract: A microelectronic photoresist cleaning composition suitable for cleaning multi-metal microelectronic devices and to do so without any substantial or significant galvanic corrosion occurring when there is a subsequent rinsing step employing water.Type: GrantFiled: October 22, 2009Date of Patent: December 25, 2012Assignee: Avantor Performance Materials Inc.Inventor: Seiji Inaoka
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Patent number: 8183195Abstract: Highly alkaline, aqueous formulations including (a) water, (b) at least one metal ion-free base at sufficient amounts to produce a final formulation alkaline pH, (c) from about 0.01% to about 5% by weight (expressed as % SiO2) of at least one water-soluble metal ion-free silicate corrosion inhibitors; (d) from about 0.01% to about 10% by weight of at least one metal chelating agent, and (e) from more than 0 to about 2.0% by weight of at least one oxymetalate are provided in accordance with this invention. Such formulations are combined with a peroxide such that a peroxymetalate is formed to produce form a microelectronic cleaning composition. Used to remove contaminants and residue from microelectronic devices, such as microelectronic substrates.Type: GrantFiled: January 28, 2008Date of Patent: May 22, 2012Assignee: Avantor Performance Materials, Inc.Inventor: Glenn L. Westwood
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Patent number: 8178482Abstract: A stripping and cleaning composition for cleaning microelectronics substrates, the composition comprising: at least one organic stripping solvent, at least one nucleophilic amine, at least one non-nitrogen containing weak acid in an amount sufficient to neutralize from about 3% to about 75% by weight of the nucleophilic amine such that the stripping composition has an aqueous pH of from about 9.6 to about 10.9, said weak acid having a pK value in aqueous solution of 2.0 or greater and an equivalent weight of less than 140, at least one metal-removing compound selected from the group consisting of diethylene glycol and diethylene glycolamine, and water, and method for cleaning microelectronic substrates with these compositions.Type: GrantFiled: June 23, 2005Date of Patent: May 15, 2012Assignee: Avantor Performance Materials, Inc.Inventor: Sean M. Kane
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Patent number: 8168577Abstract: A microelectronic cleaning compositions of: a) from about 80% to about 99% by weight of the composition of at least one organic sulfone; b) from about 0.5% to about 19% by weight of the composition of water; and c) from about 0.5% to about 10% by weight of the composition of at least one component providing tetrafluoroborate ion, and d) optionally at least one polyhydric alcohol is especially useful to clean etch/ash residues from microelectronic substrates or device having both Si-based anti-reflective coatings and low-k dielectrics.Type: GrantFiled: February 5, 2009Date of Patent: May 1, 2012Assignee: Avantor Performance Materials, Inc.Inventor: William R. Gemmill
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Patent number: 8044009Abstract: A front end of the line (FEOL) stripping and cleaning composition for cleaning unashed ion-implanted photoresist from a wafer substrate comprises: a) at least one organic stripping solvent, b) fluoride ions from at least one of ammonium fluoride, ammonium bifluoride or hydrogen fluoride, c) at least one acidifying agent selected from inorganic or organic acids, and d) water, with an oxidizing agent optionally also being present in the composition.Type: GrantFiled: March 13, 2006Date of Patent: October 25, 2011Assignee: Avantor Performance Materials, Inc.Inventors: Sean Michael Kane, Steven A. Lippy
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Patent number: 7951764Abstract: Back end photoresist strippers and cleaning compositions of this invention are provided by amino acid-free, non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor compound with multiple hydroxyl functional groups that is a compound of the formula: T1-[(CR1R2)m—(CR3R4)n]p—(CR5R6)q-T2 where at least one of R1 and R2 OH and if one of R1 and R2 is not OH, it is selected from H, alkyl or alkoxy, m is a whole integer of 1 or greater, R3 and R4 are selected from H, alkyl or alkoxy, n is 0 or a greater whole positive integer, p is a whole integer of 1 or greater; at least one of R5 and R6 is OH and if one of R5 and R6 is not OH, it is selected from H, alkyl or alkoxy, q is a whole integer of 1 or greater; T1 and T2 are selected from H, alkyl, hydroxyalkyl, polyhydroxyalkyl, aminoalkyl, carbonylalkyl or amide groups or T1 and T2 may be coType: GrantFiled: February 25, 2005Date of Patent: May 31, 2011Assignee: Avantor Performance Materials, Inc.Inventor: Seiji Inaoka
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Patent number: 7947639Abstract: Photoresist strippers and cleaning compositions of this invention are provided by non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor polymer having multiple hydroxyl- or amino-functional groups pendant from the polymer backbone.Type: GrantFiled: February 1, 2005Date of Patent: May 24, 2011Assignee: Avantor Performance Materials, Inc.Inventor: Seiji Inaoka
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Patent number: 7928046Abstract: Aqueous, silicate free, cleaning compositions of about pH 9 or below and method of using the cleaning compositions for cleaning microelectronic substrates, which compositions are able to essentially completely clean such substrates and produce essentially no metal corrosion of the metal elements of such substrates. The aqueous cleaning compositions of this invention have (a) water, (b) at least one of ammonium and quaternary ammonium ions and (c) at least one of hypophosphite (H2PO2?) and/or phosphite (HPO32?) ions. The cleaning compositions also may contain fluoride ions. Optionally, the composition may contain other components such as organic solvents, oxidizing agent, surfactants, corrosion inhibitors and metal complexing agents.Type: GrantFiled: February 8, 2006Date of Patent: April 19, 2011Assignee: Avantor Performance Materials, Inc.Inventors: Joseph M. Ilardi, David C. Skee, Sean M. Kane, Karen E. Trovalli