Patents Assigned to Aviza Technologies, Inc.
  • Methods of depositing piezoelectric films
    Patent number: 7227292
    Abstract: This invention relates to methods of depositing piezoelectric films such as in part of a stack including depositing a piezoelectric layer, measuring the thickness of the layer and depositing a further film or films such that the combined thickness is substantially equal to the target thickness.
    Type: Grant
    Filed: April 6, 2004
    Date of Patent: June 5, 2007
    Assignee: Aviza Technologies, Inc.
    Inventors: Paul Rich, Mark Ashley Ford