Patents Assigned to Aviza Technology Limted
  • RF stand offs
    Patent number: 7220943
    Abstract: This invention relates to RV stand offs or breaks and in particular, but not exclusively not to stand offs which are suitable for use in plasma generating apparatus. A stand off 14 includes a resistive or insulating cylinder 15, through which gas feeds are drilled and a close coupled helically wound combination, generally indicated at 16. This combination 16 comprises an RF conductive tube 17 in the form of a braided cable; a thermocouple 18 having twisted pair supply cables 19 and a heater element 20 in the form of a cable loop or pair.
    Type: Grant
    Filed: March 24, 2005
    Date of Patent: May 22, 2007
    Assignee: Aviza Technology Limted
    Inventor: Paul Bennett