Patents Assigned to Axcebs Technologies, Inc.
  • HYBRID ION SOURCE/MULTIMODE ION SOURCE
    Publication number: 20090032728
    Abstract: A hybrid ion source, comprising a source body configured to create plasma therein, from a first material, wherein the first material comprises one of monatomic gases, small molecule gases, large molecule gases, reactive gases, and solids, a low power plasma generation component operably associated with the source body, a high power plasma generation component operably associated with the source body and an extraction aperture configured to extract ions of the ion plasma from the source body.
    Type: Application
    Filed: July 31, 2008
    Publication date: February 5, 2009
    Applicant: Axcebs Technologies, Inc.
    Inventors: William F. DiVergilio, Daniel R. Tieger, Michael A. Graf