Patents Assigned to Axceliss Technologies, Inc
  • Method and system for ion beam containment in an ion beam guide
    Patent number: 6703628
    Abstract: Ion implantation systems and beamline assemblies therefor are provided, in which multi-cusped magnetic fields are provided in a beamguide and the beamguide is energized to provide microwave electric fields in a traveling wave along the beamguide passageway. The magnetic and electric fields interact to provide an electron-cyclotron resonance condition for beam containment in the beamguide passageway.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: March 9, 2004
    Assignee: Axceliss Technologies, Inc
    Inventors: John Zheng Ye, Victor M. Benveniste, Michael Paul Cristoforo