Patents Assigned to Axcolis Technologies, Inc.
  • Wafer transport apparatus
    Patent number: 6969227
    Abstract: A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.
    Type: Grant
    Filed: September 16, 2003
    Date of Patent: November 29, 2005
    Assignee: Axcolis Technologies, Inc.
    Inventors: David William Kinnard, Daniel Richardson