Patents Assigned to Ball Semiconductor Limited
  • Patent number: 6679118
    Abstract: An object is to provide an accelerometer or a spherical sensor-type measurement device, able to control by means of an active restraining control system a spherical mass part or a spherical sensor part. The accelerometer or spherical sensor-type measurement device has a spherical mass part, which is levitated by electrostatic supporting forces, and electrodes positioned so as to surround the spherical mass part and which have spherical inner surfaces; the above electrodes include a plurality of electrostatic supporting electrodes, positioned symmetrically with respect to the spherical mass part, and a displacement detection electrode, positioned between the electrostatic supporting electrodes.
    Type: Grant
    Filed: June 18, 2002
    Date of Patent: January 20, 2004
    Assignees: Tokimec Inc., Ball Semiconductor Limited
    Inventors: Masayoshi Esashi, Takao Murakoshi, Shigeru Nakamura, Nobuo Takeda