Abstract: A high vacuum valve comprises a casing having a valve inlet port and a va outlet port connected to the inlet port with a valve seat defined between the inlet and outlet ports. The casing also defines a valve movement passageway and a valve member is movable in the housing along the passageway between a position in which it is aligned with the valve seat for closing the valve and one in which it is out of alignment with the seat to open the valve. The valve member includes two separate relatively movable plate parts both of which move along the passageway together and one of which is movable when the valve member is aligned with the valve seat so as to move into engagement with the seat.

Abstract: A sealing construction for the interconnection of two pipes in a vacuum cection, comprises, end flanges of the pipes which have conical sealing surfaces and including a substantially C-shape metallic ring disposed between the flanges which has at least a portion of its surface in rolling and sealing engagement with the conical surfaces of the flanges. The construction may also be used between a valve member which includes a plate having a conical sealing surface which is adapted to be sealed with a valve seal of a similar conical surface. The sealing ring may be used between conical surfaces which are substantially parallel or between those which converge or diverge with the use of an additional backing ring and, preferably, also with a centering ring.

Abstract: A vacuum evaporator includes a housing defining a vacuum chamber which has mounting for an evaporative material and an electrode spaced from the evaporative material which is arranged adjacent the support for a substrate to be coated. A screening element is located between the electrode and the substrate support in the vacuum chamber. The vacuum chamber has a gas inlet port through which gases may be passed.

Abstract: A cathode assembly for electron emission, comprises, a heatable support of high-temperature resistant material, an emitter body of lanthanum hexaboride, and an auxiliary body having a surface contact with both the support and the emitter body, which is made of a third material, comprising a sintered material of the class of carbides, nitrides and borides. The surface contact area between the auxiliary body and the support amounts to at least 1/6 of the surface area of the emitter body.

Abstract: A method of producing gold-color coatings on substrates by evaporating a coating material comprising a metallic titanium or zirconium in a housing which has walls which define an evaporation space, comprises, maintaining a vacuum atmosphere containing N.sub.2 and argon in the space. The method is carried out using an anode connected to a power source to produce a low voltage arc discharge in the vicinity of the coating material which is arranged within the evaporation space and also maintaining a low voltage arc between the anode and the substrates. A potential difference between the anode and the substrates of a range of between 5 v and 100 v are maintained during the process and, in addition, the electrical potential of the substrates is maintained between 0 and 150 volts lower than the potential of the housing walls which define the evaporation space. The substrate to be coated is coated at a rate of from between 1 to 15 nanometers per second. The N.sub.

Abstract: A rotary displacement pump comprising a casing including a cylindrical in surface defining a stator chamber with an inlet and an outlet connected thereto. A cylindrical displacement body is movably mounted within the stator chamber having an outer surface which is movable into close association with the cylindrical inner surface along a line. A shaft is provided with an eccentric connected to the displacement body with a bearing to eccentrically move the displacement body within the stator chamber and move the line of close association in a circular path within the stator chamber. Gas tight spring bodies are connected between the displacement body and the casing for preventing rotation of the displacement body with respect to the casing and the displacement body is provided with first and second slide sealing members for dividing the stator chamber into an inlet base and an outlet base.

Abstract: The vacuum evaporation apparatus comprises a housing having walls defining n evacuable evaporation chamber with an evaporator in the chamber disposed below a supporting structure for the substance to be coated and including an annular screen disposed around the evaporator between the evaporator and the walls of the housing so that only an opening or angle between the evaporator and the supporting structure is left which is sufficient for the vapor deposition of the substrates. The screen is of a material which may be heated, such as a metal material, which may be electrically heated.

Abstract: The present invention relates to a device for measuring the reflection of a plane, specularly reflecting surface, in which a measuring beam of radiation is directed onto the surface to be measured through an optical converging lens and the radiation reflected from the surface is directed through the same lens to a radiation receiver. In such a system, preferably, the optical connections between the source of radiation and the converging lens and between the lens and the radiation receiver are established by means of a fiber-optical photoconductor or a lens and mirror systems. Such a device may be employed, for example, for measuring the reflection of thin layers deposited in a vacuum evaporator.

Abstract: A method of producing a high vacuum in a vacuum container which has an exst connection line connected thereto and using an interior protective covering for the walls of the container and a protective gas comprises, applying covering to the interior of the container so as to shield the inner walls thereof and to also shield the exhaust connection thereto, directing a protective gas into the space between the covering the interior walls of the container, preferably during the flooding in which the container is opened, and thereafter evacuating the interior of the container through the exhaust connection and heating the covering. The vacuum treatment device, such as a device for evaporating materials from vapor deposition, comprises a closed container having interior walls with a thin-walled metal sheet forming a covering arranged in spaced relationship to the interior walls so as to shield a major area of the walls and to define a space between the walls and the covering.

Abstract: A wafer support, comprising, a baseplate with an aperture therein and a hing ring rotatably positioned in the aperture. A platform is defined in the holding ring for supporting the peripheral edges of a wafer disposed therein and the holding ring includes a plurality of spaced slots extending parallel to the platform and spaced therefrom. A plurality of retaining rods are connected to the baseplate and extend into the slots to engage over the wafer positioned on the platform. A portion of the holding ring adjacent each slot defines a retaining rod abutment for urging each retaining rod out of its respective slot when the holding rod is rotated in the baseplate to release the supported wafer.

Abstract: A method of producing a high vacuum in a container which has limiting walls hich define a reaction chamber which is adapted to be evacuated for vacuum processing purposes, and in which gases are sorbed during vacuum operation and the gases are removed subsequently by increasing the temperature of the walls and evacuating the chamber at the same time includes heating the reaction chamber, sensing the underpressure in the reaction chamber and controlling the heating of the chamber in accordance with the sensed pressure in a manner such that the underpressure remains within a preselected upper and lower limit value until a predetermined temperature of the walls is attained.

Abstract: A clamping device for transporting a specimen plate, particularly for an ctron microscope specimen comprising, a support plate, a carrier plate disposed in juxtaposed relationship with the support plate having at least two resilient arm poritions and at least a portion of the carrier plate contacting with the support plate, and a claw connected to each resilient arm portion of the carrier plate for engaging the specimen plate therebetween. A rod having a threaded end threaded into one of the support plate and the carrier plate is rotatable in a first direction for moving the carrier plate with respect to the support plate to move each claw away from each other and rotatable in an opposite second direction to move each claw toward each other for engagement of the specimen plate therebetween.

Abstract: A method of depositing a reflection reducing coating on a substrate of oric material preferably on a spectacle glass of plastic by evaporation in a vacuum comprises depositing chromium by evaporation in an oxygen atmosphere under a pressure of betweeen 4.times.10.sup.-5 and 8.times.10.sup.-5 torr at a rate of from 0.01 to 0.05 nm per second and in a thickness of from 1 to 10 nm.

Abstract: An apparatus for treating a substrate with an ion beam comprising a closed ousing which defines a substantially evacuatable chamber, a drum having a circumferential portion with an annular inside surface rotatably mounted in the chamber, drive means connected to the drum for rotating it at a selected speed to establish a centrifugal force toward the annular inside surface of the drum and ion beam generating means associated with the housing for directing an ion beam into the chamber and toward the annular inside surface. A substrate is supportable on the inside surface of the drum and conforms with the surface so as to be closely associated therewith under the influence of the centrifugal force. This association establishes a thermally conductive relationship between the substrate and the circumferential portion so that heat generated in the substrate due to the ion beam can be dissipated through the circumferential portion of the drum.