Abstract: In order to dispose substrates, such as lenses, having different sizes in a working installation, a holding arrangement comprises a spring clasp (3) provided for the clamping holding of the substrates or lenses, which spring clasp is suitable for disposition in a holding device (9) of the arrangement.

Abstract: The hard coating includes mainly (Al,Cr).sub.2 O.sub.3 crystals and a chrome content higher than 5 at % wherein the (Al, Cr).sub.2 O.sub.3 is a single crystal. The coating is deposited at a temperature lower than 90.degree. C., preferably lower than 500.degree. C. The hard coating is deposited by a CVD or PVD process.

Abstract: In order to remove material from the surfaces in a vacuum chamber it is proposed to activate hydrogen gas in a plasma with the aid of a low voltage arc discharge which is supported by a hot emitting electrode in a cathode chamber. The removing method allows the cleaning of surfaces onto which subsequently safely adhering layers of a highest purity can be precipitated. The method can also be used for cleaning vacuum chambers. The small expenditures regarding apparatuses with the high rates of removal to be obtained produce a highly economical practicing of the method.

Abstract: A method and apparatus for applying a protective coating onto a substrate comprises a power supply for generating an amplitude-modulated alternating electromagnetic field in a vacuum chamber. A silicon-organic compound is supplied in a gaseous state into the vacuum chamber and is plasma polymerized onto the substrate in the chamber without powdery portions. Another process parameter for controlling coating rate is adjusted to be at a high level so that when the amplitude modulation is stopped, powdery portions do appear in the coating. Thus at high coating rates amplitude-modulation according to the invention avoids such powdery portions.

Abstract: A semiconductor sensor detects the existence of liquified gases by immersion or approaching the liquid. A high signal amplitude of the sensor permits a simple signal evaluation of high reliability. The sensor permits the realization of filling level measuring devices or level control devices for liquified gases.

Abstract: A method and apparatus for performing the method comprising a vacuum treatment chamber containing a target of ohmic conductive material. The target and a workpiece are supported by suitable electrodes. Superimposed DC and AC power is applied to the target to generate a glow discharge in the chamber in which the target is sputtered. Particles sputtered off the target react with a reactive gas in the space between the target and workpiece and the reaction product is deposited upon the workpiece. The operating parameters of the system are selected so that sputtering and deposition are performed in an unstable transition mode between a metallic and a reactive mode whereby particles are deposited on the workpiece to form a layer on the workpiece of lower conductivity than the target material. A feedback arrangement is preferably utilized to maintain operation with the aforesaid unstable transition mode.

Abstract: The invention relates to a method and an apparatus by means of which a material is vaporized in a treatment chamber by means of an electron beam. Due to controlling the inhomogenity of power distribution over the working area of the beam it becomes possible to prevent local overheating of the target material and thus of a deformation of the target surface. This is realized by oscillating the beam around its working point. The amplitude of the oscillation is, thereby, of almost a few beam diameters and this oscillation is superimposed on the momentarily working position of the beam on the target.

Abstract: A method of mounting a vacuum process arrangement comprises providing a cooling plate having at least one channel and at least one bayonet locking means. A heat conducting membrane is then placed over each channel of the cooling plate. A target plate having at least one bayonet locking means is also provided. The locking plate is then locked to the cooling plate over the channels by engaging the bayonet locking means of the target plate with the bayonet locking means of the cooling plate by limited relative axial and rotational movement between the plates. Finally, a cooling medium is introduced in the channels of the cooling plate and pressurized.

Abstract: In order to heat-up a commodity to be heated or a substrate to be coated, uniformly in a vacuum chamber or in a recipient, by means of a gas discharge or low voltage arc discharge, at least one locally variable and/or displaceable magnetic field is maintained in the vacuum chamber or in the recipient at least during the heating up step. Preferably, at least two magnet fields are maintained which partially overlap and which alternatingly are operated stronger or weaker, to therewith locally influence the current density in the vacuum chamber or recipient, in order to produce along the substrate or the commodity to be heated, alternatingly a stronger or less strong heating.

Abstract: A coated tool or instrument has a wear-resistant hard coating (7) which is preferably titanium nitride for working organic material which is disposed on a separating layer (9) applied on a basic body (3). The separating layer (9) comprises a ceramic electrically non-conducting material. Such a material is preferably an oxide, nitride or oxynitride of silicon. The separating layer (9) protects the basic body (3) of the tool or instrument of e.g. a non-corrosion resistant steel. During the coating of the basic body (3) with the ceramic material, a pulsating dc voltage is applied to the basic body (3) or its holders. The pulse height is changed during the vapor deposition from high negative values to low negative values.

Abstract: The invention proceeds from a vacuum process apparatus for an article which is processed or treated, resp. at two stations, whereby each station has a charging and/or removing opening for the article. A transporting device is supported for rotation and includes a supporting portion which is successively moved onto the openings of the stations. The process plant is designed in such a manner that the surface normals determined by the surfaces of the openings and the space axis defined by the axis of rotation of the transport device do not run parallel and rather enclose together an angle of 90.degree. or 45.degree.. By such an arrangement it is possible to design extremely compact vacuum vapor deposition apparatuses having a plurality of individual stations, whereby additionally short transporting distances are obtainable and the volumes to be conditioned can be minimized.

Abstract: In order to ignite a vaporizing arc on a target which includes at least at its surface a material of a high melting point to be vaporized, and to stabilize and guide same, an electron beam gun or a laser is forseen for generating of a local vapor cloud or a premelted spot on the surface of the target in order to therewith ignite and guide the arc spot.

Abstract: During the guiding and centering of an electron beam by means of a magnet field arranged orthogonally to the axis of the electron beam in a vacuum coating plant the signals which are decisive regarding the configuration and control of the magnet field or its axis of rotation, resp., are supplied by a detecting of the burning spot of the electron beam on the surface of the evaporation source by means of a video system, i.e. by means of a video camera resp. and a corresponding picture evaluated.

Abstract: In a plasma-enhanced chemical vapor deposition method, in order to achieve greater space for positioning workpieces to be coated simultaneously and essentially identically on all sides, the workpiece are positioned at a distance from one electrode on the basis of a coating rate gradient.

Abstract: To reach a better production sequence and an increased quality for plasma polymerization coatings and evaporation coatings on both sides of optical lenses, it is suggested to proceed with the deposition of the layers within an especially suitable apparatus configuration where the plasma polymerization coating is deposited simultaneously on both sides of the lenses.

Abstract: Coated highly wear-resistant tools have an Me.sup.1.sub.1-x (.alpha..sub.2 Me.sup.2 * .alpha..sub.3 Me.sup.3 * . . . .alpha..sub.n Me.sup.n).sub.x N.sub.u C.sub.v O.sub.w coating, wherein Me.sup.1 is a metal of the chemical group IVb of the periodic system, and Me.sup.2, Me.sup.3, . . . , Me.sup.n are other metals. The values u+v+w=1 and the Me concentration changes at least once continuously over the layer thickness to .alpha..sub.2 Me.sup.2 * .alpha..sub.3 Me.sup.3, . . . .alpha..sub.n Me.sup.n. The value for x is preferably between 0.1 and 0.7, the values for v and/or w can be approximately zero or w<0.3, and the further metal Me.sup.2, Me.sup.3, . . . , Me.sup.n is another metal of the chemical group IVb of the periodic system and/or vanadium and/or preferably aluminum. In working tasks with the tools according to the invention as compared to known tools, a significantly increased service life is obtained.

Abstract: An arrangement for holding and cooling bearing shell blanks (2) positioned one next to the other during a coating process in a vacuum chamber, has cooling body and work piece holding pairs (3) which are detachable from each other and which are connected to one another via a cooling surface (9) and a heat transmission surface (7). A work piece holding part (5) of the cooling body and the work piece holding pair (3) is implemented so that the bearing shell blanks (2) are placed in a concave bearing surface (32) of the holding part during the coating process and are kept, over their entire surface, at a temperature determined by the cooling surface temperature. A temperature gradient can be formed if teflon foil strips are placed on the bearing surface. These allow only a direct heat contact of the apex of the bearing shell blanks (2) with the bearing surface.

Abstract: For the transmission of heat under vacuum conditions to a workpiece, a carrier is used with gas outlets and gas return openings distributed on its surface. A dynamic gas layer is thus formed between the carrier and the workpiece wherein the gas effects thermal conduction between the carrier and the workpiece. The gas outlets terminate in a distribution space implemented as a groove and has at least on slot shaped aperture extending substantially around most of the carrier periphery.

Abstract: An electron beam generator having an electron emission cathode adopted to be rapidly mounted to an installation, has an electronically insulating support body that is clamped on one side to a metal contact body having a large surface area. At the other side of the electrically insulating support body, a quick release device is arranged in order to rapidly mount and dismount the generator to an installation.

Abstract: In order to coat a substrate by a transparent coating of a medium refractivity, consisting substantially of at least one metal oxide mixture a coating of an at least substantially homogenous mixture of up to about 80 percent by weight praseodymium oxide and the balance aluminum oxide is used. The coating includes 20 to 88 percent by weight, preferably 30 to 80 percent by weight praseodymium oxide. This reflection reducing transparent reflection reducing transparent coating having at least one metal oxide mixture is specifically suitable for the coating of optical substrates.