Abstract: A method of determining the rate of flow of particles in a vacuum deposition device, using the relationship that the rate of flow of the particles is equal to the density of the particle current times the mean velocity of the particles, comprises establishing a flow or current of particles in the device and directing a laser beam through the current of particles in order to measure the atteunation of the beam after it has passed through the particles and thus to determine the vapor density within the current. The absorption wavelength shift of the laser beam provides an indication of the velocity component of the current because the shift is produced by a Doppler effect by the velocity component of the particle current in the direction of flow from the source of the particles to the substrate to be coated.

Abstract: A light transmitting, absorbing coating is produced on a substrate by depositing by cathode sputtering alternate layers of silicon in an oxidizing residual gas atmosphere and chrome in a non-oxidizing residual gas atmosphere. The light transmitting layer comprises a substrate having a coating of a bluish-grey transmission color which comprises a plurality of alternate chrome and silicon dioxide layers with the thickness of the individual chrome layers being smaller than 10 nm.

Abstract: A pump, particularly a turbo vacuum pump, comprises a housing having an intake and an exhaust spaced from the intake. The respective ends of the housing are provided with bearing bushes which extend in respective opposite directions and support a pump rotor in a manner to permit it to have some axial and radial play. A first magnetic system acts on the rotor and stabilizes the rotor axially in respect to the bearings and a second magnetic system acts on the rotor and stabilizes the rotor radially in respect to the bearings. The second magnetic system includes at least one permanent magnet which is fixed to the casing and faces either soft iron or permanent magnet portions provided on the rotor. An electromotor is mounted within the casing and the coil of the electrodynamic system and the stator of the drive motor are assembled to a subassembly which can be mounted or dismounted from the pump casing in a simple manner without interfering with the rotor or the stator.

Abstract: The support is rotated by a central drive shaft extending into a vacuum chamber in sealed relation thereto, with the central drive shaft having support arms secured thereto and each carrying a respective support head, each support head having several substrate holding plates rotatably mounted thereon and coupled together by a respective gear train for turning about their axes of rotation. Each support head is rotatable by a respective support head drive shaft coupled to the central drive shaft through gearing and carrying a driving gear forming part of the gear train. A respective fixed cam plate is secured to each support head and has a stop cooperable with two oppositely acting pawls mounted on the support head. A respective second cam plate is secured to the driving gear of each gear train, and includes cam portions cooperable with the pawls and cam portions cooperable with an abutment on the associated support head.

Abstract: The concentration ratio of two components of a mixture of substances, having absorption bands which are adjacent each other in a manner such that the radiation absorption of the mixture of substances has a minimum between these absorption bands, is determined by measuring, in three adjacent, narrow spectral regions, of the radiation transmitted by the mixture of substances, a variable which is proportional to the ratio .DELTA..sup.1 I / .DELTA..sup.2 I wherein the numerator .DELTA..sup.1 I = (I.sub.3 - I.sub.1) is the difference between the intensities of radiation of the two outer spectral regions, and the denominator .DELTA..sup.2 I = (I.sub.3 - I.sub.2) -(I.sub.2 - I.sub.1) is the value by which the respective differences between the intensities of radiation of each outer spectral region and the middle spectral region differ from each other.

Abstract: An apparatus for depositing thin coatings by vaporization onto substrates under the simultaneous action of an ionized gas comprises a gas chamber which is subdivided into first and second compartments which are connected to each other through a gas flow restrictor. The first compartment has a gas discharge electrode and has a connection to a supply line for the gas to be ionized. The second compartment contains a counterelectrode, an evaporator and means for holding the objects to be coated and is also connected to a pump to maintain a pressured gradient between the two compartments during vaporization.

Abstract: In an electron beam-generating system including an electron-emitting cathode, a beam focusing electrode, and an anode electrode for accelerating the emitted electrons, the magnetic fields for deflecting the beam to material to be heated and for periodically deflecting the focal spot of the beam on the material are produced by a heavy current conductor, that is, a conductor carrying a high current, arranged in proximity to the curved path of the deflected electron beam and extending perpendicular to the plane of deflection of the electron beam. The anode electrode may be formed with an opening for the passage of the electron beam, and the heavy current conductor is arranged in the proximity of the opening and parallel to the latter. The heavy current conductor may be designed as an edge of a slot-shaped opening, and may comprise a plurality of individual conductors.

Abstract: The mass spectrometer is of the type having a mass-spectrometric separation system located in an evacuable chamber, an inlet to the chamber for the gases to be examined, and an ion source and a detector for the gas mixture constituting auxiliary devices in the chamber and having walls. The gas inlet and the auxiliary devices are arranged in series, with the gas inlet being formed as an inlet nozzle operable to form a jet of the gas to be examined and so designed, relative to the auxiliary devices, as to direct the jet, as a molecular beam, through one auxiliary device without contacting a wall thereof so that the jet enters directly into the other auxiliary device. The ion source is arranged between the detector and the nozzle, and may be designed as a hot-cathode ion source. The detector may be designed as a hot-cathode ionization detector or as an ion source of a second mass-spectroscopic separation arrangement.

Abstract: A method and apparatus for enriching a gas of lower molecular weight with substances of higher molecular weight contained therein, comprises using first and second molecular pumps connected together, with the second pump having a conveying direction different from the first pump, and wherein a feed line for the gas terminates in a working chamber of the first molecular pump and its exhaust side includes extraction means for the enriching component. The gas is conducted to the working chamber of the first molecular pump and a portion of the gas is conveyed at the intake side of the molecular pump by means of the second pump. The substances of higher molecular weight are collected and extracted at the exhaust side of the first molecular pump.

Abstract: An apparatus for electron-beam evaporation comprises a holding structure or support for the substance to be evaporated arranged alongside a hot cathode. A focusing and accelerating electrode is located adjacent the hot cathode and acts on the electrons emitted thereby. Means are provided for generating a magnetic field in the electron flow path in order to deviate the electrons to the substance. An ion-collecting electrode is located adjacent the hot cathode for collecting the ions formed in the vapor beam during the evaporation. The substance to be evaporated, the means for producing the electron beam and the ion-collecting electrode are all arranged in order one after the other in the magnetic field.

Abstract: A light beam splitter comprises a light transmissive support which comprises a colored glass having an absorption edge spectrally limiting the reflection of the light splitter. A multilayer interference coating is applied to the colored glass and it includes two adjacent filter spectral region working ranges and it transmits one spectral region of one filter working range and reflects the other adjacent working range. The interference coating has a ratio of optical thickness of the low refraction to the high refractive layers of from 1 to 2 to 1 to 9. The colored glass support is advantageously formed with an absorption edge at the short wave side of the wave length centroid of the spectral region to be reflected by the light splitter.