Patents Assigned to Balzers Prozess Systeme GmbH
  • Patent number: 5728280
    Abstract: A pot-shaped hollow target (4) is open toward the substrate (3) that is to be coated, a dark-space shield (6) surrounds the lateral wall (5) of the target (4), and a cathode base body (11) is supported on an insulator (8) on the roof (9) of the vacuum chamber (2) and is connected electrically to a power source (10). A magnet belt (12) formed of a plurality of magnets (18, 18') surrounds the dark-space shield (6). A turntable (15) having an axis of rotation (16) parallel to and offset from the target's (4) perpendicular plane of symmetry (17) is provided for holding the substrates (3).
    Type: Grant
    Filed: February 19, 1997
    Date of Patent: March 17, 1998
    Assignee: Balzers Prozess Systeme GmbH
    Inventor: Michael Scherer