Abstract: An imaging system for imaging a substrate surface at several imaging wavelengths comprises a replaceable beam generating module, a spinning mirror and a controller. The beam generating module generates an imaging beam in dependence on beam command signals. The imaging beam has a wavelength which is a one of the plurality of imaging wavelengths. The beam generating module further presents the imaging beam along a prescribed path, and the beam generating module generates wavelength signals indicative of the imaging beam wavelength. The controller receives the wavelength signals, and generates the beam command signals in dependence on the wavelength signals. The beam command signals control generation of the imaging beam in accordance with a prescribed pattern to image upon the substrate surface.

Abstract: An optical beam expander mechanism includes a plurality of lenses movably secured to a carriage of an imaging system for varying the magnification and adjusting the focus of an optical beam. A scanning means is also secured to the carriage for reflecting the optical beam from or to a media disposed within an exposure chamber. The carriage is slidably mounted to a spar for scanning the media as the carriage moves along the length of the spar. The carriage includes a plurality of independently controlled magnetically preloaded air bearings to provide an air cushion for frictionless movement of the lens along the carriage. The beam expander mechanism further includes an arm member which sequentially engages each lens and maintains the lens in fixed relationship to the spar for positioning the lens on the carriage. To move each lens to its proper position on the carriage, the arm member engages the lens.