Patents Assigned to Basf Aktiengesellischaft
  • Dicopper(I) oxalate complexes for use as precursor substances in metallic copper deposition
    Patent number: 7169947
    Abstract: The invention relates to dicopper(I) oxalate complexes stabilised by neutral Lewis base components and to the use thereof as precursors for the deposition of metallic copper. The neutral Lewis bases used are alkynes or alkenes containing at least one silyl or ester group, or nitrites, saturated or unsaturated nitrogen ligands, phosphites, trialkyl-phosphines or oxygen- or sulfur-containing ligands.
    Type: Grant
    Filed: June 5, 2003
    Date of Patent: January 30, 2007
    Assignee: Basf Aktiengesellischaft
    Inventors: Katrin Koehler, Franc Meyer