Abstract: Disclosed are a Fabry-Perot sensor and a method for manufacturing the same. A Fabry-Perot sensor including: a base part; a cavity formed between the base part and a pressure-sensitive film, and enclosed by the base part and the pressure-sensitive film; the pressure-sensitive film, fixed to the base part, wherein the pressure-sensitive film has one or more localised areas, each localised area has a doping substance doped into a base material of the pressure-sensitive film to produce stress, no localised area penetrates the entire thickness of the pressure-sensitive film, and under the effect of stress, the pressure-sensitive film has a corrugated structure; an optic fibre used for conducting a light signal, one end part of the optic fibre being fixed to an optic fibre mounting part of the base part, and the optic fibre mounting part being located at an end part of the base part opposite the cavity.
Type:
Grant
Filed:
December 4, 2018
Date of Patent:
September 27, 2022
Assignee:
BEIJING BYWAVE SENSING SCIENCE & TECHNOLOGY
DEVELOPMENT CO., LTD.
Abstract: Disclosed are a Fabry-Perot sensor and a method for manufacturing the same. A Fabry-Perot sensor including: a base part; a cavity formed between the base part and a pressure-sensitive film, and enclosed by the base part and the pressure-sensitive film; the pressure-sensitive film, fixed to the base part, wherein the pressure-sensitive film has one or more localised areas, each localised area has a doping substance doped into a base material of the pressure-sensitive film to produce stress, no localised area penetrates the entire thickness of the pressure-sensitive film, and under the effect of stress, the pressure-sensitive film has a corrugated structure; an optic fibre used for conducting a light signal, one end part of the optic fibre being fixed to an optic fibre mounting part of the base part, and the optic fibre mounting part being located at an end part of the base part opposite the cavity.
Type:
Application
Filed:
December 4, 2018
Publication date:
December 10, 2020
Applicant:
BEIJING BYWAVE SENSING SCIENCE & TECHNOLOGY DEVELOPMENT CO., LTD.