Patents Assigned to Beijing E-Town Semiconductor Technologv Co., Ltd.
  • Pre-heat processes for millisecond anneal system
    Patent number: 11101142
    Abstract: Preheat processes for a millisecond anneal system are provided. In one example implementation, a heat treatment process can include receiving a substrate on a wafer support in a processing chamber of a millisecond anneal system; heating the substrate to an intermediate temperature; and heating the substrate using a millisecond heating flash. Prior to heating the substrate to the intermediate temperature, the process can include heating the substrate to a pre-bake temperature for a soak period.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: August 24, 2021
    Assignees: Beijing E-Town Semiconductor Technologv Co., Ltd., Mattson Technology, Inc.
    Inventor: Paul Timans