Abstract: The present disclosure provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes whose diameters have a proportional relationship. The fluid sensor provided by the present disclosure can guarantee measurement accuracy in a whole measurement range and also can improve device reliability.

Abstract: The present disclosure provides a gas flow regulating device and a mass flow controller. The gas flow regulating device includes: a valve port component, in which a first inlet channel is provided; a push rod component, in which a first through hole is provided, a push rod being provided in the first through hole, a first end surface of the push rod facing a gas outlet end of the first inlet channel, and the push rod being elastically connected with the push rod component through an elastic diaphragm; and a driving assembly configured to drive the push rod to move along a direction of approaching or leaving the first inlet channel to cause the first end surface of the push rod to be in contact with and seal or separate from the gas outlet end of the first inlet channel. In the gas flow regulating device, the structure can be simplified, the number of parts in contact with gas can be reduced, and the fault caused by the failure of a spring piece can be avoided.

Abstract: An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, an output terminal, a sensor unit, a flow rate control valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts an actual setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a storage module, a setting signal calibration module and a calculation module. The valve control circuit generates, based on a control signal, an openness control signal, so as to control the flow rate control valve. It is concluded that the flow rate control quality is improved by the present invention.

Abstract: An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, a sensor unit, an electromagnetic valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts a flow rate setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a control module and a calculation module. The valve control circuit opens the electromagnetic valve according to the first control signal only, and further regulates an openness of the electromagnetic valve according to the first control signal and the second control signal. It is concluded that response time of the mass flow control apparatus of the present invention is shorten, and control quality is improved.