Patents Assigned to Beijing Superstring Academy of Memory Technology
  • Patent number: 12250831
    Abstract: A semiconductor device and a method of manufacturing the same, and an electronic apparatus including the semiconductor device are provided. The semiconductor device includes: an active region, on a substrate, extending substantially in a vertical direction; a gate stack formed around at least a part of a periphery of the active region, the active region including a channel region opposite to the gate stack, and a first source/drain region and a second source/drain region, and the gate stack including a gate dielectric layer, a work function tuning layer and a gate electrode material layer, and the work function tuning layer being between the gate electrode material layer and the channel region; and a first low-k dielectric layer extending from a first end of the work function tuning layer to surround a first corner of an end portion, on a side facing the channel region, of the gate electrode material layer.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: March 11, 2025
    Assignees: Beijing Superstring Academy of Memory Technology, Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20250071968
    Abstract: A semiconductor device, manufacturing method therefor, and electronic equipment are provided. The manufacturing method includes: alternately depositing sacrificial layers and insulation layers to obtain a stacked structure; forming in the stacked structure a plurality of via holes distributed at intervals, and forming dummy word lines in the via holes; forming a first trench penetrating through the stacked structure every two via holes apart; forming a plurality of grooves by re-etching the plurality of insulation layers within the first trench, wherein two grooves of each insulation layer in two first trenches respectively expose partial side walls of a dummy word line; forming conductive layers within the two grooves corresponding to each insulation layer, wherein a conductive layer within each groove surrounds two exposed dummy word lines; and disconnecting a conductive layer surrounding a dummy word line to form a first electrode and a second electrode of a transistor.
    Type: Application
    Filed: June 26, 2024
    Publication date: February 27, 2025
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Xuezheng AI, Xiangsheng WANG, Guilei WANG, Chao ZHAO, Wenhua GUI
  • Patent number: 12235766
    Abstract: A CXL memory module, a memory data swap method and a computer system. The CXL memory module may include a flash memory chip, a memory chip, and a controller chip connected with the flash memory chip and the memory chip. The controller chip is configured to be able to swap a part of data in the memory chip into the flash memory chip.
    Type: Grant
    Filed: March 19, 2024
    Date of Patent: February 25, 2025
    Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventor: Jin Dai
  • Patent number: 12238918
    Abstract: Provided are a semiconductor device and manufacturing method thereof, and an electronic device. The semiconductor device includes multiple storage cells distributed in a direction perpendicular to a base substrate, the multiple storage cells include multiple transistors and capacitors distributed in different layers and stacked in the direction perpendicular to the base substrate; a word line penetrating different layers and extending in the direction perpendicular to the base substrate; a transistor includes a first source/drain electrode, a second source/drain electrode and a semiconductor layer surrounding a sidewall of the word line; first insulating layers and conductive layers alternately distributed in the direction perpendicular to the base substrate, at least one first hole penetrating the different layers; and the second electrode of the capacitor includes an inner electrode disposed in the first hole on the first electrode.
    Type: Grant
    Filed: June 26, 2024
    Date of Patent: February 25, 2025
    Assignee: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Wenhua Gui, Xuezheng Ai, Guilei Wang, Jin Dai, Xiangsheng Wang
  • Publication number: 20250063714
    Abstract: Provided is a memory. The memory includes: a plurality of memory cells, word lines, and bit lines; wherein each of the memory cells comprises: a first transistor, wherein a first source of the first transistor is electrically connected to the bit line; a second transistor, connected in series to the first transistor; and a capacitor, electrically connected to a second drain of the second transistor. The first transistor and the second transistor are both n-type transistors or p-type transistors, and a first gate of the first transistor and a second gate of the second transistor are electrically connected to the word line.
    Type: Application
    Filed: December 20, 2022
    Publication date: February 20, 2025
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Zhengyong ZHU, Chao ZHAO, Bokmoon KANG, Guilei WANG
  • Publication number: 20250056790
    Abstract: Provided are a semiconductor device and manufacturing method thereof, and an electronic device. The semiconductor device includes multiple storage cells distributed in a direction perpendicular to a base substrate, the multiple storage cells include multiple transistors and capacitors distributed in different layers and stacked in the direction perpendicular to the base substrate; a word line penetrating different layers and extending in the direction perpendicular to the base substrate; a transistor includes a first source/drain electrode, a second source/drain electrode and a semiconductor layer surrounding a sidewall of the word line; first insulating layers and conductive layers alternately distributed in the direction perpendicular to the base substrate, at least one first hole penetrating the different layers; and the second electrode of the capacitor includes an inner electrode disposed in the first hole on the first electrode.
    Type: Application
    Filed: June 26, 2024
    Publication date: February 13, 2025
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Wenhua GUI, Xuezheng AI, Guilei WANG, Jin DAI, Xiangsheng WANG
  • Publication number: 20250048615
    Abstract: A 3D stacked semiconductor device, a manufacturing method therefor, and an electronic equipment are disclosed. The 3D stacked semiconductor device includes a plurality of transistors distributed in different layers and stacked along a direction perpendicular to a base substrate; a word line penetrating through the transistors of the different layers; and a plurality of protective layers corresponding to the plurality of transistors respectively; wherein each transistor includes a semiconductor layer surrounding a side wall of the word line, a gate insulation layer disposed between the side wall of the word line and the semiconductor layer, a plurality of semiconductor layers of the plurality of transistors are disposed at intervals in a direction in which the word line extends; each of the protective layers respectively surrounds and covers an outer side wall of a corresponding semiconductor layer, and two adjacent protective layers are disconnected from each other.
    Type: Application
    Filed: June 8, 2023
    Publication date: February 6, 2025
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Xuezheng Ai, Xiangsheng Wang, Guilei Wang, Jin Dai, Chao Zhao, Wenhua Gui
  • Publication number: 20250029653
    Abstract: Provided is a memory. The memory includes at least one memory array and at least one control circuit, wherein the memory array comprises a plurality of memory cells arranged in an array as well as read wordlines and read bitlines for read operations, wherein each of the memory cells comprises a first transistor and a second transistor. The control circuit is configured to transmit, during a pre-processing stage, a first voltage to the read wordline and the read bitline; transmit, during a pre-charging stage, a second voltage to the read bitline; and transmit, during a read-sensing stage, a third voltage to the read wordline.
    Type: Application
    Filed: May 12, 2022
    Publication date: January 23, 2025
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Zhengyong ZHU, Bokmoon KANG, Dan WANG, Chao ZHAO
  • Publication number: 20250031411
    Abstract: A vertical transistor, and a memory cell and a manufacturing method therefor are provided. The vertical transistor includes: a source electrode disposed on a substrate; a drain electrode which is disposed at a side, away from the substrate, of the source electrode; and a gate electrode and a semiconductor layer, which are in the same layer, and are disposed between the source electrode and the drain electrode in a first direction which is perpendicular to the substrate. The gate electrode at least comprises a column-shaped first gate electrode extending in the first direction. The semiconductor layer comprises a first semiconductor layer and a second semiconductor layer which are in the same layer and spaced apart from each other, and the first gate electrode is disposed between the first semiconductor layer and the second semiconductor layer.
    Type: Application
    Filed: December 7, 2022
    Publication date: January 23, 2025
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Huihui LI, Yunsen ZHANG, Guilei WANG, Chao ZHAO
  • Patent number: 12183807
    Abstract: A semiconductor device and a method for manufacturing the same. A first electrode layer, a semiconductor layer, and a second electrode layer are formed on a substrate. The semiconductor layer is etched form a sidewall to form a cavity. A channel layer is formed at the cavity and sidewalls of the first electrode layer and the second electrode layer. The channel layer includes a first channel part located in the cavity and a second channel part located outside the cavity. The first channel part is filled with a dummy gate layer. The dummy gate layer is etched from a sidewall. The second channel part and the first channel part, which is in contact with upper and lower surfaces of the dummy gate layer are removed to form a recess. The recess is filled with a dielectric material to form an isolation sidewall.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: December 31, 2024
    Assignees: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY, INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Weixing Huang, Huilong Zhu
  • Publication number: 20240412778
    Abstract: A memory cell, an array read-write method, a control chip, a memory, and an electronic device. The memory cell comprises: a first transistor (TR_R) and a second transistor (TR_W); the first transistor comprises a first electrode, a second electrode, a third electrode, and a fourth electrode; the third electrode is a first gate, and the fourth electrode is a second gate; the second transistor comprises a fifth electrode, a sixth electrode, and a seventh electrode; the seventh electrode is a third gate; the first electrode is connected to a read bit line, the second electrode is connected to a reference signal, the first gate is connected to a read word line, the second gate is connected to the fifth electrode; the sixth electrode is connected to a write bit line, the third gate is connected to a write word line.
    Type: Application
    Filed: December 21, 2022
    Publication date: December 12, 2024
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Zhengyong Zhu, Bokmoon Kang, Chao Zhao
  • Publication number: 20240389306
    Abstract: The semiconductor device includes: a substrate; a plurality of memory cell columns, wherein each memory cell column includes a plurality of memory cells, arranged and stacked on one side of the substrate in a first direction, and the plurality of memory cell columns are arranged on the substrate in a second direction and in a third direction to form an array; the memory cells each include a transistor and a capacitor, the transistor including a semiconductor layer and a gate, and semiconductor layer includes a source region, an inversion channel region and a drain region; a plurality of bit lines, extending in the first direction, wherein the source regions of the transistors of the plurality of memory cells in two adjacent memory cell columns in the second direction, are all connected to one bit line; and a plurality of word lines, extending in the third direction.
    Type: Application
    Filed: September 23, 2022
    Publication date: November 21, 2024
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Xiangsheng Wang, Guilei Wang, Chao Zhao
  • Publication number: 20240311305
    Abstract: A CXL memory module, a memory data swap method and a computer system. The CXL memory module may include a flash memory chip, a memory chip, and a controller chip connected with the flash memory chip and the memory chip. The controller chip is configured to be able to swap a part of data in the memory chip into the flash memory chip.
    Type: Application
    Filed: March 19, 2024
    Publication date: September 19, 2024
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventor: Jin DAI
  • Publication number: 20240313103
    Abstract: The vertical MOSFET device includes: an active region including a first source/drain layer, a channel layer and a second source/drain layer vertically stacked on a substrate in sequence, wherein an outer periphery of the channel layer is recessed with respect to outer peripheries of the first source/drain layer and the second source/drain layer; a spacing layer including an upper spacing layer and a lower spacing layer, wherein the upper spacing layer and the lower spacing layer are both in contact with a side surface of the channel layer and are not in communication with each other; and a gate stack formed at least on a lateral outer periphery of the channel layer and embedded in a groove space between the upper spacing layer and the lower spacing layer.
    Type: Application
    Filed: December 14, 2021
    Publication date: September 19, 2024
    Applicants: Beijing Superstring Academy of Memory Technology, Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Zhongrui Xiao
  • Publication number: 20240290678
    Abstract: Provided is a semiconductor structure. The semiconductor structure includes a substrate including a die region and a non-die region, wherein an accommodation recess is formed in a side of the substrate and positioned in the non-die region; a buffer disposed in the accommodation recess; a functional film layer disposed on the side, where the accommodation recess is formed, of the substrate; and a passivation layer covering the functional film layer and the substrate. A buffer cavity with an opening facing away from the substrate is formed in the buffer. An orthographic projection of the functional film layer on the substrate is within the die region. A first through-via is formed in the passivation layer. An orthographic projection of the first through-via on the substrate is at least partially overlapped with an orthographic projection of the opening on the substrate. The opening is in communication with the first through-via.
    Type: Application
    Filed: June 7, 2023
    Publication date: August 29, 2024
    Applicant: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventor: Ming ZENG
  • Patent number: 12041763
    Abstract: A method for forming a capacitor, the capacitor and a semiconductor device are provided. The method includes: providing a semiconductor structure including a substrate, a stacked-layer structure, a protective layer, a first mask layer, and a photolithography layer which is provided with a plurality of cross-shaped patterns arranged in a square close-packed manner; patterning the first mask layer based on the photolithography layer; forming a plurality of through holes penetrating through the protective layer and the stacked-layer structure based on the patterned first mask layer by etching, in which in a direction perpendicular to a surface of the substrate, a projection of each through hole is cross-shaped, and the plurality of through holes are arranged in the square close-packed manner; and forming a first electrode layer, a dielectric layer and a second electrode layer covering an inner wall of each through hole to form the capacitor.
    Type: Grant
    Filed: June 24, 2022
    Date of Patent: July 16, 2024
    Assignees: CHANGXIN MEMORY TECHNOLOGIES, INC., BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY
    Inventors: Guangsu Shao, Mengkang Yu, Xingsong Su
  • Patent number: 12039305
    Abstract: A method for a compilation, an electronic device and a readable storage medium are provided. The method for a compilation includes analyzing source program data to determine a target irregular branch, generating an update data flow graph according to the target irregular branch, and mapping the update data flow graph to a target hardware to complete the compilation.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: July 16, 2024
    Assignees: Beijing Superstring Academy of Memory Technology, Tsinghua University
    Inventors: Baofen Yuan, Shouyi Yin, Shaojun Wei
  • Patent number: 11985811
    Abstract: A semiconductor memory device and a manufacturing method thereof, a reading/writing method, an electronic device and a memory circuit are provided. A transistor is provided in each memory cell in the semiconductor memory device. A gate electrode and an auxiliary electrode are provided in the transistor, and the auxiliary electrode is electrically connected to a drain electrode. During a writing operation, a first voltage is applied to the gate electrode through a word line, and an electrical signal is applied to a source electrode through a bit line according to the external input data.
    Type: Grant
    Filed: April 28, 2023
    Date of Patent: May 14, 2024
    Assignee: Beijing Superstring Academy of Memory Technology
    Inventors: Zhengyong Zhu, Bokmoon Kang, Guilei Wang, Chao Zhao
  • Publication number: 20240145591
    Abstract: The present disclosure relates to a vertical MOSFET device, a manufacturing method and application thereof.
    Type: Application
    Filed: December 13, 2021
    Publication date: May 2, 2024
    Applicants: Beijing Superstring Academy of Memory Technology, INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Zhuo CHEN, Huilong ZHU
  • Publication number: 20240147686
    Abstract: The present invention relates to a semiconductor memory cell structure, a semiconductor memory as well as preparation method and application thereof. The semiconductor memory cell structure includes: a substrate; and a first transistor layer, an isolation layer and a second transistor layer. The first transistor layer includes a first stack structure formed by stacking a first source, a first channel, and a first drain from bottom to top; and a first gate located on a sidewall of the first stack structure. The second transistor layer includes: a second stack structure formed by stacking a second drain, a second channel, and a second source from bottom to top; and a second gate located on a sidewall of the second stack structure, at least a part of a sidewall of the second drain is in direct contact with the first gate.
    Type: Application
    Filed: December 9, 2021
    Publication date: May 2, 2024
    Applicants: Beijing Superstring Academy of Memory Technology, INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Qi WANG, Huilong ZHU