Patents Assigned to Benzing Technology, Inc.
  • Troide plasma reactor with magnetic enhancement
    Patent number: 4572759
    Abstract: A triode apparatus with magnetic enhancement for dry processing semiconductor wafers and the like. A conductive substantially cylindrical chamber contains a cathode that is connected to a first source of AC power. A wafer stage mounted on the inside of the chamber wall is connected to a second source of AC power. The chamber has means for connection to a reference voltage potential. Means for generating a magnetic field perpendicular to the electric field generated between the chamber walls and the cathode is also provided.
    Type: Grant
    Filed: December 26, 1984
    Date of Patent: February 25, 1986
    Assignee: Benzing Technology, Inc.
    Inventor: David W. Benzing