Patents Assigned to Berkeley Glasslab
  • Cantilever paddle for use with wafer boats
    Patent number: 4516897
    Abstract: A cantilever wafer paddle system for use in the manufacture of semiconductor devices so the system having two support members positioned above and attached to a suspension member such that the suspension member is capable of supporting and suspending a series of wafer boats within a diffusion tube without allowing any portion of the paddle, boats or wafers contained within the boats to contact the internal walls of the diffusion tube.
    Type: Grant
    Filed: May 23, 1983
    Date of Patent: May 14, 1985
    Assignee: Berkeley Glasslab
    Inventors: Wendall L. Snider, Edward A. Wagner