Abstract: A method and apparatus for treating a work surface, wherein there is provided a chamber having a longitudinal axis and longitudinally extending electrically conductive sidewalls, at least one sidewall having at least one longitudinally extending gap that interrupts a current path through the sidewalls transverse to the longitudinal axis, and wherein the chamber is sealed to allow pressure inside the chamber to be controlled.
Type:
Grant
Filed:
June 7, 1995
Date of Patent:
February 23, 1999
Assignees:
Berkeley Scholars, Inc., Research Triangle Institute, Minnesota Mining and Manufacturing Company
Inventors:
Anthony E. Robson, Ronald A. Rudder, Robert C. Hendry, Moses M. David, James V. Burt