Abstract: The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.

Abstract: The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

Abstract: The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube, wherein the flow sensor comprises an excitation element for causing the tube to oscillate, as well as a detection element for detecting at least a measure of displacements of parts of the tube during operation. In some embodiments, the detection element comprises two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

Abstract: Flow measurement system comprising a flow tube for the fluid whose flow rate is to be determined, wherein said system comprises at least three ultrasound transducer circuitry, wherein each circuitry comprises an ultrasound transducer arranged for transmitting ultrasound signals through said fluid in a transmitting phase, and for receiving transmitted signals from another of said at least three ultrasound transducers in a receiving phase, multiple receiving circuits, wherein each receiving circuit is arranged for reading out one of said at least three ultrasound transducers in a corresponding receiving phase thereof, and multiplexer circuitry ground arranged for selectively connecting each of said multiple receiving circuits to a different one of said at least three ultrasound transducers, respectively.

Abstract: The invention relates to an ultrasonic flow measurement system comprising a flow tube for the fluid whose flow rate is to be determined and at least two ultrasound transducer circuitry. At least one of the at least two ultrasound transducer circuitry comprises an ultrasound transmitter that is arranged for transmitting ultrasound signals through said fluid in a transmitting phase, and at least another one of the at least two ultrasound transducer circuitry comprises an ultrasound receiver that is arranged for receiving transmitted ultrasound signals in a receiving phase. The system further comprises at least one receiving circuit that is arranged for reading out the ultrasound receiver in the receiving phase; and control means connected to the at least two ultrasound transducer circuitry and to the at least one receiving circuit.

Abstract: The invention relates to a fluid flow device (1), comprising a system chip (11) having a substrate (12), a flow channel (21) defined within said substrate, and a sensor unit (41) connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit (30) is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber (31) defined within said substrate, and a valve member (32) that is movably arranged within the valve chamber. The flow channel has a connection channel part (22) defined within said substrate (12), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.

Abstract: The invention relates to a thermal type flow meter. The flow meter comprises a base part with at least two through bores extending substantially parallel to each other. A flow tube for the medium whose flow is to be determined is provided through the through bores. A part of the flow tube spaced from the base part comprises a measuring tube part where the flow of the medium can be measured. The flow measuring tube comprises an insulating housing connected to the base part, which surrounds at least the measuring tube part of the flow tube. The insulating housing comprises an inner housing surface, which faces the measuring tube part, as well as an outer housing surface, which faces away from the measuring tube part. According to the invention, a cover element connected to the base part is provided, which cover element at least substantially surrounds the insulating housing.

Abstract: The invention relates to a Coriolis flow sensor. The sensor comprises a housing and at least a Coriolis-tube with at least two ends being fixed in a tube fixation means. The flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the Coriolis flow sensor comprises a reference mass, as well as further excitation means arranged for causing the reference mass to oscillate during operation, as well as further detection means for detecting at least a measure of displacements of the reference mass during operation. Additionally, control means are provided for controlling the excitation means and/or further excitation means based on vibrations measured by the detection means and/or further detection means. This way a Coriolis flow sensor with active vibration isolation is obtained.

Abstract: The invention relates to a fluid flow regulator device, comprising a valve member and a valve seat arranged to be movable with respect to each other such that a fluid flow surface area defined by the valve member and the valve seat can be changed. Furthermore, sensor means are provided for measuring a capacitance related to at least a measure of the fluid flow surface area. According to the invention, the sensor means are arranged such that the capacitance measured is inversely proportional to the distance between the valve member and the valve seat. In an embodiment, a reference capacitance relating to fluid flow conditions is measured.

Abstract: The invention relates to a device (1) for determining the combustion value of a fuel. The device (1) comprises a fuel inlet (40) for supplying the fuel to be measured to the device (1). A gas inlet (50) is provided for supplying an oxygen-containing gas to the device (1). The device (1) further comprises a combustion unit connected to the fuel inlet (40) and the gas inlet (50), which combustion unit is provided with a combustion chamber (7) for combusting the fuel to be measured therein. A gas outlet (8) connected to the combustion chamber (7) makes it possible to discharge the combusted gas. The device (1) according to the invention comprises a flow measurement unit (14), preferably of the Coriolis type, disposed between the fuel inlet (40) and the combustion chamber (7).

Abstract: The invention relates to an ultrasonic flow meter comprising a flow tube for the fluid whose flow rate is to be determined. The flow meter comprises a transmitting element for emitting ultrasonic waves, which is provided on the outer jacket of the flow tube. A receiving element, which is provided on the outer jacket of the flow tube, is axially spaced from the transmitting element. An influencing element is provided between the transmitting element and the receiving element for influencing the velocity and/or the direction of a portion of the ultrasonic waves.

Abstract: The invention relates to a Coriolis flow sensor. The sensor comprises a housing and at least a Coriolis-tube with at least two ends being fixed in a tube fixation means. The flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the Coriolis flow sensor comprises a reference mass, as well as further excitation means arranged for causing the reference mass to oscillate during operation, as well as further detection means for detecting at least a measure of displacements of the reference mass during operation. Additionally, control means are provided for controlling the excitation means and/or further excitation means based on vibrations measured by the detection means and/or further detection means. This way a Coriolis flow sensor with active vibration isolation is obtained.

Abstract: The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

Abstract: The invention relates to a fluid flow regulator device, comprising a valve member and a valve seat arranged to be movable with respect to each other such that a fluid flow surface area defined by the valve member and the valve seat can be changed. Furthermore, sensor means are provided for measuring a capacitance related to at least a measure of the fluid flow surface area. According to the invention, the sensor means are arranged such that the capacitance measured is inversely proportional to the distance between the valve member and the valve seat. In an embodiment, a reference capacitance relating to fluid flow conditions is measured.

Abstract: The invention relates to a flow meter for determining a flow of a medium. The flow meter comprises a flow tube for transporting the medium whose flow is to be measured. The flow tube has a supply end and a discharge end disposed downstream thereof. The flow meter is provided with a first flow sensor for measuring the flow of the medium at a first position of the flow tube. The flow meter is provided with a second flow sensor for measuring the flow of the medium at a second position of the flow tube.

Abstract: A Coriolis flow sensor including a loop-shaped Coriolis tube mounted in a housing with two ends lying next to one another, the ends being fixed in a fixation element, while the portion of the tube located between the ends lies free from the housing, which flow sensor includes an excitation element for causing the tube to oscillate about an excitation axis as well as a detection element for detecting displacements of portions of the tube during operation. The tube is connected through the fixation element to a balancing member, the assembly of the balancing member and the tube being resiliently arranged with respect to the housing, while the excitation element are arranged to rotate the tube and the balancing member with counter-phase about the excitation axis.

Abstract: A Coriolis flow sensor including a loop-shaped Coriolis tube mounted in a housing with two ends lying next to one another, the ends being fixed in a fixation element, while the portion of the tube located between the ends lies free from the housing, which flow sensor includes an excitation element for causing the tube to oscillate about an excitation axis as well as a detection element for detecting displacements of portions of the tube during operation.

Abstract: A Coriolis flow sensor including a loop-shaped Coriolis tube mounted in a housing with two ends lying next to one another, the ends being fixed in a fixation element, while the portion of the tube located between the ends lies free from the housing, which flow sensor includes an excitation element for causing the tube to oscillate about an excitation axis as well as a detection element for detecting displacements of portions of the tube during operation. The tube is connected through the fixation element to a balancing member, the assembly of the balancing member and the tube being resiliently arranged with respect to the housing, while the excitation element are arranged to rotate the tube and the balancing member with counter-phase about the excitation axis.

Abstract: The invention relates to a flow meter for determining a flow of a medium. The flow meter comprises a flow tube for transporting the medium whose flow is to be measured. The flow tube has a supply end and a discharge end disposed downstream thereof. The flow meter is provided with a first flow sensor for measuring the flow of the medium at a first position of the flow tube. The flow meter is provided with a second flow sensor for measuring the flow of the medium at a second position of the flow tube.