Abstract: Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

Abstract: Disclosed is a capacitive non-directional coupler having a non-directional coupler printed circuit board (PCB) and a capacitive attenuator. The non-directional coupler PCB includes a coupler section configured to carry energy travelling on a main transmission line. The non-directional coupler PCB and the capacitive attenuator are configured as a capacitive voltage divider, and provide a sample of the energy on the main transmission line. Also disclosed is a method for measuring for measuring RF power using an RF power sensor having the capacitive non-directional coupler that includes with the non-directional coupler printed circuit board and the capacitive attenuator. Also disclosed is an RF power metering system that includes an RF power sensor having the capacitive non-directional coupler.

Abstract: Disclosed is a capacitive non-directional coupler having a non-directional coupler printed circuit board (PCB) and a capacitive attenuator. The non-directional coupler PCB includes a coupler section configured to carry energy travelling on a main transmission line. The non-directional coupler PCB and the capacitive attenuator are configured as a capacitive voltage divider, and provide a sample of the energy on the main transmission line. Also disclosed is a method for measuring for measuring RF power using an RF power sensor having the capacitive non-directional coupler that includes with the non-directional coupler printed circuit board and the capacitive attenuator. Also disclosed is an RF power metering system that includes an RF power sensor having the capacitive non-directional coupler.

Abstract: Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

Abstract: Disclosed is a passive intermodulation (PIM) test system having a pulsed signal generator configured to generate and apply a pulsed stimulus signal to a device under test. The PIM test system is further configured to measure a power of at least one PIM product generated by a PIM source in the device under test using the pulsed stimulus signal. Also disclosed in a method for evaluating PIM in a device under test, the method includes using a pulsed stimulus signal to measure a power of at least one PIM product generated by a PIM source in the device under test.

Abstract: Disclosed is a capacitive non-directional coupler having a non-directional coupler printed circuit board (PCB) and a capacitive attenuator. The non-directional coupler PCB includes a coupler section configured to carry energy travelling on a main transmission line. The non-directional coupler PCB and the capacitive attenuator are configured as a capacitive voltage divider, and provide a sample of the energy on the main transmission line. Also disclosed is a method for measuring for measuring RF power using an RF power sensor having the capacitive non-directional coupler that includes with the non-directional coupler printed circuit board and the capacitive attenuator. Also disclosed is an RF power metering system that includes an RF power sensor having the capacitive non-directional coupler.

Abstract: Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.

Abstract: Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

Abstract: Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.

Abstract: Disclosed is a radio frequency (RF) power calorimeter having a load electrically coupled to a RF input, a variable low-frequency power source electrically coupled to the load and configured to apply low-frequency bias to the load. The RF power calorimeter includes a thermal medium thermally coupled to the load. Additionally, the RF power calorimeter includes an outlet temperature sensor thermally coupled to the thermal medium, the outlet temperature sensor being positioned to measure the temperature of the thermal medium due to heating by the load. The RF power calorimeter also has circuitry configured to use temperature measurements of the thermal medium in thermal contact with an RF load in combination with the low-frequency bias to measure average power of an RF source electrically coupled to the RF input. Also disclosed in a method of measuring RF power using the RF power calorimeter.

Abstract: The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.

Abstract: Disclosed is a passive intermodulation (PIM) test system having a pulsed signal generator configured to generate and apply a pulsed stimulus signal to a device under test. The PIM test system is further configured to measure a power of at least one PIM product generated by a PIM source in the device under test using the pulsed stimulus signal. Also disclosed in a method for Cevaluating PIM in a device under test, the method includes using a pulsed stimulus signal to measure a power of at least one PIM product generated by a PIM source in the device under test.

Abstract: The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.

Abstract: The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.

Abstract: The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.

Abstract: A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe (8) is connected to an RF transmission line for receiving and measuring voltage (10) and current signals (12) from the transmission line (4). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.

Abstract: A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe (8) is connected to an RF transmission line for receiving and measuring voltage (10) and current signals (12) from the transmission line (4). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.